二手 OXFORD Plasmalab 100 Plus #293731086 待售
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ID: 293731086
晶圆大小: 3"-4"
Reactive Ion Etcher (RIE), 3"-4"
Process: CHF3 and SF6
(6) MFC gases: SiCl4, SF6, Cl2, Ar, O2, N2
Loadlock
Gasbox (6 lines) with bypass
Clamp system for HE cooling (not fitted)
No Laser reflectometer
Turbo pump broken
Missing parts:
RF Power supply
Chiller
Mechanical pump.
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