二手 PLASMATHERM Versalock 700 #293729350 待售
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ID: 293729350
晶圆大小: 6"
优质的: 1998
Reactive Ion Etcher (RIE), 4"
Dual chamber
(2) NESLAB Chillers
(3) EDWARDS iQDP80 Pumps
Process module: CF4 / N2 / CHF3 / AR / SF6 / O2
RF1, RF2 (RFPP RF5S)
Loadlock
Handler
VAT gate valve
Transfer robot
Throttle valve
Manuals
Cortex computer and software
Operating system: Windows 10
1998 vintage.
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