二手 SAMCO RIE-1C #9357610 待售

Reactive Ion Etcher (RIE) Vacuum chamber: Quartz: 212 mm diameter Rectangular view port at front panel Hinged lid with front mounted handle Mesh cover Electrodes: Parallel plate design Cathode coupling (RIE) mode Distance: 44 mm (Fixed) Upper electrode: Aluminum Diameter: 140 mm Shower-head gas dispersion system Lower electrode: Type: Cathode (RF electrode) Stainless steel Diameter: 120 mm Water cooled Special tray: Aluminum Diameter: 120 mm Maximum substrate size: 100 mm RF Power source: Solid state power generator Crystal control Power: 13.56 MHz, 200 W (Maximum) RF Power interlock With chamber lid Vacuum pump: Double stage rotary pump Flow rate: 240 l/min With PFPE pump fluid Oil mist filter Solenoid operated nitrogen gas ballast control valve Couplings with metal vacuum hose Vacuum gauge: Capacitance monometer: 0-2 Torr Gas delivery and inlet system: (2) Mechanical flow meter controlled lines: CF4 / O2 Nitrogen purging line Flow range: 0-20 SCCM Timers: Digital for process time: 0-99 Seconds, minutes / Hours Resolution: 0.1s Adjustable purging time: 0-60 Seconds Audio alarm Utilities required: Step-down transformer Cooling water: 2 Liter/min Supply pressure: 15-20°C, 0.1-0.2 MPa Supply and return connection: RC 1/4" and 1/4" O.D Tubing Depth filter: 20 µm Process gas supply: 0.1 MPa (15 psig) Connection: Swagelok fittings, ¼" Filters: 2 µm Safety features: Door interlock Pressure interlock Pressure reached alert Venting: Exhaust duct for pump NW 25 Rotary pump exhaust Power supply: 100 VAC, 15 A, Single phase.