二手 SEZ / LAM RESEARCH DV-34 #9233096 待售

Single wafer processing system Particle, polymer, & residue removal Wafers Wafer type: Standard Wafer surface treatment Cassette interfaces (25) Wafers Wafer robot (dual arm): BROOKS DBM-2406 V Robot controller: BROOKS EDC-2400 Dual ceramic end effector End effector size: 12 Options: OHT (Over Head Transfer) Light curtain Ionizer: 5285e / 4630 No open cassette adapter No wafer protrusion sensor (200mm) No carrier ID reader (RFID) No AGV Process modules: 4 / 8 Chambers (L / R) 4 chambers PSL-1 & PSL-2 (Left side): Medium-1 arm (Standard): Chemical used Medium-2 arm (Option): Chemical used DIW Arm Chuck (ADV pin) Spindle & elevating units PM I/O & Safety Box No active jet nozzle PSR-1 & PSR-2 (Right side): Medium-1 arm (Standard): Chemical used Medium-2 arm (Option): Chemical used DIW Arm Chuck (ADV pin) Spindle & elevating units PM I/O & Safety box No active jet nozzle Liquid / Chem supply cabinets (CHC1 / CHC2): CHC1: (Standard & Dual tank) Tank A: Medium REZI38 Mix ratio / Temperature 25°C Medium fill port, type: Auto fill Medium paddle wheel DIW Fill port, type: Auto fill DIW Paddle wheel Medium in-line filtration system Sampling port Buffer tank Suckback valves ULTRASONIC Flow meter Tank B: Used for chemical Medium REZI38 Mix ratio / Temperature 25°C Medium fill port, type: Auto fill Medium paddle wheel DIW Fill port, type: Auto fill DIW Paddle wheel Medium in-line filtration system Sampling port Buffer tank Suckback valves ULTRASONIC Flow meter Dual in-line heater & cooler No DI/O3 line Process pump No booster pump Recirculation pump Drain pump CHC2: System standard: (8) Chambers System option: (4) Chambers Tank A: Medium paddle wheel DIW Paddle wheel No medium in-line filtration system Sampling port No buffer tank Suckback valves ULTRASONIC Flow meter Tank B: Medium paddle wheel DIW paddle wheel No medium in-line filtration system Sampling port No buffer tank Suckback valves ULTRASONIC Flow-meter Dual in-line heater & cooler No DI/O3 line Process pump No booster pump installed Recirculation pump Drain pump CDS I/O & safety box Separate drain Chemical supply: Med-1 Pre mix Med-2 Pre mix DIW Option: HORIBA Chemical analyzer Safety: Earthquake protection FM 4910 Compliant material No main unit drip pan No drip pan leak detection Host control: SECS II (HSMS) No SECS II (RS232) User interface: Status lamp (R/Y/B/G) Sound module Front & back side UI (touch+keyboard) Options: Wafer handling robot display (CCD / Monitor) Process chamber display No dedicated backing pump No XRD module No ozone module Transformer: 30 kVA Transformer CE compliant (Input 208 Y) No transformer CE compliant with GFI (Input 208 Y) UPS No entire system (30 kVA): In 400 VAC / Out 400 VAC No control PC only (2 kVA): In 230 VAC / Out 230 VAC No pre-etch thickness No post-etch thickness No target uniformity of etch No backside surface conditioning No rough finish No polished finish No front-side etch No back-side etch No backside etch & bevel clean No oxide thinning / Removal No nitride thinning / Removal No polysilicon thinning / Removal No bevel clean No undercut Missing parts: (2) ECO Tune motors (8) Dispenser motors (2) Brake pin cylinders (2) Dispenser nozzles (2) VALVlE SAM-3250-NZD401FFI(12) Drain pump Filter Power supply: 208 VAC, 20 kVA Power Distribution Box (PDB) CE Color code No UL color code 2007 vintage.