二手 SEZ / LAM RESEARCH DV-38 #9098878 待售

Etchers, 12" Power: 400VAC / 3P+N , 63A, 50 / 60Hz General data Equipment platform: (8) Chambers Handling: Sankyo frontside (1) Chemistry Cassette loading: Operator: Yes Overhead transport system (OHT): Yes Fab layout: Through the wall: Yes Front machine section: Front frame: (3) Load ports Front section: Robot & controller Robot end effector Main PC Front FFU Buffer station Rear section: General data for chemical blend module (CBM) Material: FM-complaint (Mat.: PVDF) Door hinges: Left Position of CCC, UPS for CCC and hand shake box: Left Position of monitor & keyboard: Left Position of the CBM Type B: Seperate CBM Type B connected to system: DV38F Rear section: ECO FFU Control cabinet Process section Left: PSL 1: Process chamber Chuck Spindle unit Dispenser motors PSL 2: Process chamber chuck Spindle unit Dispenser motors PSL 3: Process chamber chuck Spindle unit Dispenser motors PSL 4: Process chamber chuck Spindle unit Dispenser motors Gas facility box: Regulators & MFC's CDS: Pump,valves, chemistry lines General data for chemical blend module (CBM): Material: FM-complaint(Mat.: PVDF) Door hinges: Right Position of CCC, UPS for CCC and hand shake box: Right Position of monitor & keyboard: Right Position of the CBM Type B: Seperate CBM Type B connected to system: DV38F Process Section Right: PSR 1: Process chamber Chuck Spindle unit Dispenser motors PSR 2: Process chamber chuck Spindle unit Dispenser motors PSR 3: Process chamber chuck Spindle unit Dispenser motors PSR 4: Process chamber chuck Spindle unit Dispenser motors 2006-2007 vintages.