二手 TEGAL 6500 / 6540 #165814 待售

Dry etch system, 6" Software Main Software: Tegal Software Version 5.54 Operating System: DOS Host Interface: Tegal 65** Gem/Secs Ii Version 1.9e Human Interface Main Interface: Vga Monitor (12vdc) With Touchscreen (Front) Remote Interface: Vga Monitor (12vdc) With Touchscreen (Rear) Additional Interface: Windows Compliant Keyboard Signal Tower: Yes (Red, Amber And Green) Process Module: PM1 / PM2 / PM3 Manufacturer: TEGAL / TEGAL / TEGAL Function: PLASMA/RIE ETCH / PLASMA/RIE ETCH / PLASMA STRIPPER Environment: VERY-LOW PRESSURE / VERY-LOW PRESSURE / LOW PRESSURE Chamber: CAPACITIVE COUPLED / CAPACITIVE COUPLED / INDUCTIVE COUPLED Chuck: ESC CHUCK / ESC CHUCK / CENTERING RING Rough Pump: ALCATEL ADS602 / ALCATEL ADS602 / ALCATEL ADS602 Turbo Pump: VARIAN TV-1001 / VARIAN TV-1001 / NONE Turbo Pump Controller: VARIAN TURBO-V 1000 ICE / VARIAN TURBO-V 1000 ICE / NONE Convectron: VARIAN EYESYS CONVECTORR X2 (SUB-CHAMBER X1 AND FORELINE X1) / VARIAN EYESYS CONVECTORR X2 (SUB-CHAMBER X1 AND FORELINE X1) / VARIAN EYESYS CONVECTORR X2 (SUB-CHAMBER X1 AND FORELINE X1) Baratron: MYKROLIS CMX100 (100mTORR) / MYKROLIS CMX100 (100mTORR) / MKS CAPACITANCE MANOMETER (1TORR) Ion Gauge: EDWARDS ACTIVE GAUGE AIM-S-NW25 / EDWARDS ACTIVE GAUGE AIM-S-NW25 / NONE Pressure Control: VAT THROTTLE VALVE (61246-PIGG-AEG1) / VAT THROTTLE VALVE (61246-PIGG-AEG1) / VAT THROTTLE VALVE (61246-PIGG-AEG1) Endpoint: DIODE ARRAY / DIODE ARRAY / DUAL DIODE RF GENERATOR (Mhz) MKS OEM-12B / MKS OEM-12B / MKS OEM-12B RF GENERATOR (Khz) ENI LPG-6ATM 1 / ENI LPG-6ATM 1 / NONE Mfc 1 CF4 (50sccm) CF4 (50sccm) O2 (2000sccm) Mfc 2 Cl2 (50sccm) Cl2 (50sccm) O2 (200sccm) Mfc 3 NOT USED / HBr (50sccm) NOT USED / HBr (50sccm) N2 (200sccm) Mfc 4 CHF3 (100sccm) / CHF3 (100sccm) / NONE Mfc 5 Ar (50sccm) Ar (50sccm) NONE Mfc 6 O2 (50sccm) O2 (50sccm) NONE Wafer Backside: Flow He (5Torr UPC) He (5Torr UPC) NONE Purge Gas: N2 / N2 / NONE Vent Gas: N2 / N2 Temp. Control: HEAT EXCHANGER ON CHUCK AND UPPER WALL (80 DEG CELSIUS) / HEAT EXCHANGER ON CHUCK AND UPPER WALL (80 DEG CELSIUS) / CHUCK COIL HEATER (250 DEG CELSIUS) Temp. Control Unit: NESLAB DUAL CHANNEL TCU / NESLAB DUAL CHANNEL TCU / THE SIXTH SENSE AI-100 TEMP. CONTROLLER Rinser Module: PM4 Manufacturer: SEMITOOL Function: SINGLE WAFER RINSER/DRIER Environment: ATMOSPHERIC Chamber: PTFE BOWL W/ PVDF LINED HEAD COVER Chuck: PTFE FINGER CANTILEVER ON HEAD ROTOR Rotor: STEPPER MOTOR W/ LC-1 MOTOR DRIVER Rinser Head: LIFT AND ROTATE ASSEMBLY Purge Gas: N2 Diw Temp: 80 DEGREES CELSIUS Temp. Control: IN-LINE HEATER (PVDF HOUSING WITH PFA-JACKETED HEATING ELEMENT) Temp. Control Unit: TEGAL DIW HEATER CONTROLLER Pre-Aligner Module: PM5 Manufacturer: BROOKS AUTOMATION Function: WAFER FLAT AND CENTER ALIGNER Environment: VERY LOW PRESSURE Chamber: ALUMINUM HOUSING MOUNTED TO CORE Chuck: FORK WITH RUBBER PADS Transfer Module: TM1 TM2 Manufacturer: ASYST ADE Function: THETA AND RADIUS ROBOT ARM Z-AXIS, THETA AND RADIUS ROBOT ARM Environment: VERY LOW PRESSURE ATMOSPHERIC Controller: ASYST UTC-100A CONTROL SYSTEM ADE SERIES 350 ARM CONTROLLER Chamber: MOUNTED INSIDE THE CORE CHAMBER MOUNTED ON THE ATMOSPHERIC PLATFORM Modules Serviced: CM1, PM5, PM1, PM2 AND PM3 PM3, PM4 AND CM2 Casette Module: CM1 CM2 Manufacturer: TEGAL TEGAL Function: SENDER RECIEVER Environment: ATMOSPHERIC / VERY LOW PRESSURE ATMOSPHERIC Chamber: ALUMINUM HOUSING MOUNTED TO THE CORE PLATFORM-TYPE Elevator: YES / NO Wafer Sensing: RETRO-REFLECTIVE SENSOR (INDIVIDUAL WAFER SENSING) RETRO-REFLECTIVE SENSOR (BLOCK SENSING AFTER CASETTE IS LOADED) Vent Gas: N2 NONE Convectron: VARIAN EYESYS CONVECTORR X1 NONE Miscellaneous: CORE Manufacturer: TEGAL Function: HEXAGON-SHAPED CORE CHAMBER Environment: VERY-LOW PRESSURE Chamber: ALUMINUM HOUSING WITH CLEAR ACRYLIC TOP COVER Rough Pump: ALCATEL ADP122 Turbo Pump: VARIAN TV-301 Turbo Pump Controller: VARIAN TUBO-V 301 VAVIGATOR CONTROL UNIT Convectron: VARIAN EYESYS CONVECTORR X2 (CORE X1 AND FORELINE X1) Facility Requirements Ac Power: YES WITH POWER TRANSFORMER (380Vac Secondary, 3φ, 75KVA) Cda: YES Diw: YES Cooling Water: YES Industrial City Water : YES Warehoused 2006 vintage.