二手 TEL / TOKYO ELECTRON Indy-B-L #293637434 待售

LPCVD Furnace, 12" Wafer type: Si semi STD Notch (100) Production wafers Maximum operating temperature: 500-1000 N2 Load lock Boat type handling position O2 Density control for N2 Load lock N2 Boat shower wafer cooling 560A Furnace temperature controller VMM-56-002 Heater Wafer / Carrier handling: (25) Carrier type: FOUP ENTEGRIS A300 Carrier stage capacity: 16 Pin pad A, B Fork material: Al203 and peek With type: 1+4 Edge grip With auto teaching Furnace facilities: Furnace exhaust connection point: Top connection Cooling water connection point: Bottom connection Gas specification: IGS 1.5" W-seal rail-mount FUJIKIN IGS Tubing bend bend (Less than 90°) HORIBA STEC Incoming gas connection point: Bottom connection Gas vent connection point: Bottom connection Gas unit exhaust connection point: Bottom connection Process gas exhaust connection point: Bottom connection Exhaust specification: MKS Vacuum gauge-press controller MKS Vacuum gauge-press monitor MKS Vacuum gauge-pump monitor CKD-VEC Main valve Condenser Reactor specification: Tube material: Quartz (outter), quartz (inner) Inner tube type (LP): Straight Inner T/C: Outer tube inferior (wall type) Tube sealing: O Ring Soft backfill injector Boat type: (117) Slots, pitch, 8 mm Boat rotation Pedestal type: Quartz No shutter purge type Interface specification: Host communication: Comply with GJG Equipment host I/F Connection: Gas box top HSMS Ingenio OHT Capability Load port operation: Upper PIO I/F Location: FNC Top HOKUYO DMS-HB1-Z PIO RF Carrier ID Reader writer type CIDRW L/P: Read and write ASYST ATR 9100 CIDRW TEL CIDRW User interface Signal tower model: Customized Signal tower colors (From the top): Red / Green / Yellow Signal tower location: Front Front operation panel MMI and gas flow chart: Gas box and front operation panel installed Indicator type: Superset Operator switch: Operator access / orange Pressure display unit (Gas inlet / vacuum): Mpa / Pa Cabinet exhaust pressure display unit: Pa Gas leak detector: Gas1 / SiH4 Gas2 / PH3 Gas3 / ClF3 Cable length: FNC-Power box: 20 meter Power box -refill system: 30 meter Power specification: Voltage: 208 VAC, 3 Phase Phase connection type: Star connection Voltage single-phase: 120 VAC Single-phase connection type: Grounded Frequency: 60 Hz Power cable input entrance location: Power box top 2007 vintage.