二手 TEL / TOKYO ELECTRON Indy-B-L #293637439 待售
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ID: 293637439
晶圆大小: 12"
优质的: 2012
LPCVD Furnace, 12"
Wafer type: Si semi STD Notch
(100) Production wafers
Maximum operating temperature: 500-1000
N2 Load lock
Boat type handling position
O2 Density control for N2 Load lock
N2 Boat shower wafer cooling
560A Furnace temperature controller
VMM-56-002 Heater
Wafer / Carrier handling:
(25) Carrier type: FOUP
ENTEGRIS A300
Carrier stage capacity: 16
Pin pad A, B
Fork material: Al203 and peek
W/T Type: 1+4 Edge grip
W/T Auto teaching
Furnace facilities:
Furnace exhaust connection point: Top connection
Cooling water connection point: Bottom connection
Gas specification:
IGS 1.5" W-seal rail-mount
FUJIKIN IGS
Tubing bend bend (Less than 90°)
HORIBA STEC
Incoming gas connection point: Bottom connection
Gas vent connection point: Bottom connection
Gas unit exhaust connection point: Bottom connection
Process gas exhaust connection point: Bottom connection
Exhaust specification:
MKS Vacuum gauge-press controller
MKS Vacuum gauge-press monitor
MKS Vacuum gauge-pump monitor
CKD-VEC Main valve
Condenser
Reactor specification:
Tube material: Quartz (outter), quartz (inner)
Inner tube Type (LP): Straight
Inner T/C: Outer tube inferior (wall type)
Tube sealing: O Ring
Soft backfill injector
Boat type: (117) Slots, pitch, 8 mm
Boat rotation
Pedestal type: Quartz
No shutter purge type
Interface specification:
Host communication: Comply with GJG
Equipment host I/F connection: Gas box top HSMS
Ingenio
OHT Capability
Load port operation: Upper
PIO I/F Location: FNC Top
HOKUYO DMS-HB1-Z PIO
RF Carrier ID reader writer type
CIDRW L/P: Read and write
ASYST ATR 9100 CIDRW
TEL CIDRW
User interface
Signal tower model: Customized
Signal tower colors (From the Top): Red / Green / Yellow
Signal tower location: Front
Front operation panel
MMI and gas flow chart: Gas box and front operation panel installed
Indicator type: Superset
Operator switch: Operator access / orange
Pressure display unit (gas inlet / vacuum): Mpa / Pa
Cabinet exhaust pressure display unit: Pa
Gas leak detector:
Gas1 / SiH4
Gas2 / PH3
Gas3 / ClF3
Cable length:
FNC-Power box: 20 meter
Power box -refill system: 30 meter
Power specification:
Voltage: 208 VAC, 3 Phase
Phase connection type: Star connection
Voltage single-phase: 120 VAC
Single-phase connection type: Grounded
Frequency: 60 Hz
Power cable input entrance location: Power box top
2012 vintage.
TEL/TOKYO ELECTRON Indy-B-L是一种蚀刻器（又称asher），用于制造半导体器件。它是建立在自动化平台上的单晶片设备，提供高精度。它有一个加载/卸载系统，可以处理超过300晶圆/小时，确保快速和准确的处理，同时保持最高产量。TEL INDY B L的设计采用了坚固可靠的设备,可为要求最苛刻的制造提供极高的生产效率和准确性。TOKYO ELECTRON INDY B-L带有一个直接驱动负载端口，可最大限度地减少循环时间并确保稳定的蚀刻条件。它还有一个晶片处理机，确保晶片被牢固地固定，以便安全地转移到加工工具上，并防止在处理过程中失调或断裂。TOKYO ELECTRON Indy-B-L先进的控制工具和全面的消息中心提供了对蚀刻过程的实时洞察,有助于确保最佳效果。TEL/TOKYO ELECTRON INDY B L拥有先进的露天技术，具有多种蚀刻配方。这使得每个晶片上的性能和质量一致，并且允许蚀刻器用各种气体和介质进行蚀刻。TEL/TOKYO ELECTRON INDY B-L还有一个集成的过程分析模块，允许实时进行过程监测，以确保最佳结果，同时防止任何过度蚀刻。除了这些功能外，TOKYO ELECTRON INDY B L还提供了广泛的定制规格，以适应客户的需求。TEL Indy-B-L提供各种尺寸和设计,可针对各种介质进行配置,并提供现场清洁功能。Indy-B-L也有很宽的温度范围，允许精确和均匀的过程。总体而言,TEL INDY B-L是一种蚀刻器,提供卓越的性能和质量,同时提供更高的产量和更快的周期时间。其广泛的特性和定制配置使其成为半导体制造的理想解决方桉。
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