二手 TEL / TOKYO ELECTRON Indy Plus-A-M #293656320 待售

Furnace, 12" Process: Low-temperature nitride Maximum operating temperature: 850°C N2 Load lock Wafer type: 300 Si semi STD-Notch (100) Production wafers (2) Boat type / (2) boat operation (B/S) Loading area light: White (LED) O2 Density control N2 LL N2 Boat shower wafer cooling ENTEGRIS F300-2005- 17UT1502 Carrier type: FOUP 25 slots Edge grip W/T type VMM-56-306C Mid temperature Top furnace exhaust connection point Bottom cooling water connection point FUJIKIN IGS Tubing bends: Bend (Less than 90°) IGS Final filter CKD IGS Regulator HITACHI Digital IGS Press transducer: Nagano HITACHI AS102S-A HCD SCCM MKS Capacitance manometer Press monitor Pump monitor Main valve: CKD-VEC Power box top Vacuum exhaust system, 4" Piping trap CKD-VEC Vacuum pressure control Quartz material: Electric fused Quartz inner/outer tube material Internal T/C: Process tube interior wall type Tube sealing: N2 Purge and O-Ring seal Manifold heater Switch valve for manifold cool QUARTZ Boat material 117-Slots Ladder (8mm pitch) Two quartz fins are welded at the bottom Cap heater QUARTZ Pedestal type Shutter purge type Power supply: 3-Phase connection type: Star connection Single phase connection: Grounded Single phase voltage: 120 VAC 3-Phase voltage: 480 VAC 2016 vintage.