二手 TEL / TOKYO ELECTRON INDY PLUS B M #293637534 待售

Diffusion furnace, 12" Carrier stage body Main body Vacuum box X-Precursor bubbler box Option box Heater PWR Box: XP41VP (2) XP42VP XS7VP XP2 XS5 Pump interphone MM1 INTFC 2XP1 XP56VP XS73VP (2) XT902 TMA SAFTY Unit XS103VP XP776VP XT 514-8 XT516 XT739 (2) XT901 TMA SAFTY Unit Interphone XP92VP XT530 XP40VP GRSO PCB CN1 GRSO CN2 (5) XT513 (11) XT514 (5) XT510 XT513-1 XT513-2 XT513-3 XT510-7 (2) XP 1028 EXC XP 1023 EXC XP 1024 EXC XP 1025 EXC T/C Unit T/C Cable T/C Box Control box top cover Gas piping duct RCU Piping box Piping Gas detector Smoke detector T/C Junction box G/Box exhaust connection FNC TOP Exhaust connection O2 Analyzer Vacuum box cover-1 Control box fox jig Cooling water piping Facility connection cover Scavenger cover Heater panel Vacuum box cover-2 Heater frame support Option box cover Shutter corer Carrier stage TOP Cover front panel Fixed tripod Positioning iron piece Screws Manifold Main valve Vacuum piping P1 Vacuum piping P2 Vacuum piping P3 Vacuum piping P4 Vacuum piping P5 (Bellow) Inner tube support ring Pedestal plate Center ring Outer tube lock ring Boat rotate support Inner tube lock ring Outer tube seal ring Manifold heater Vacuum piping tape heater Manifold ceiling water piping Leak check port handle valve Vacuum piping clamp Heater insulator Power box 2010 vintage.