二手 TEL / TOKYO ELECTRON Indy Plus #293627608 待售

Furnace, 12" Process: ALDZROX Reactor: Boat rotation Furnace: Loading area light: White (LED) Wafer / Carrier handling: Fork material-Al2O3 + Peek Facilities: Furnace exhaust connection poi: Top connection Cooling water connection point: Bottom connection Furnace (Exhaust / Box, Gas / Box: Main-Fab) Power box: Sub-Fab Gas distribution system: IGS Type: IGS 1.125" W-seal rail-mount IGS Maker: FUJIKIN Tubing bends: Bend (Less than 90°) IGS Final filter-PALL IGS Regulator: CKD IGS MFC: AE / Digital IGS Press transducer: NAGANO Gas facilities: Gas VENT connection point: Bottom connection Exhaust VENT connection point: Bottom Connection Gas unit exhaust connection point: Top connection Process gas exhaust connection: Bottom connection Exhaust : Vacuum gage: Press control: MKS (Hot) Capacitance manometer Press monitor: MKS (Hot) Capacitance manometer Pump monitor: MKS (Hot) Capacitance manometer Main valve-CKD-Hi-speed VEC Vacuum pressure controller: CKD-VEC Heater model: Low temperature VMM-56-201 4 Zone/150-600C Without RCU Interface specification, Factory automation system: Carrier ID reader writer type: RF CIDRW Lower load port: Read Interface: Signal tower model: LOUGWB-24-4 Tower as follows: LOUGWB-24-4 (2) LOUGWB-24-3, Default = 1 Signal tower colors: Red / Yellow / Green / Blue Tower as follows: Red / Yellow / Green / Blue (2) Red / Yellow / Green Signal tower: Front Front operation panel MMI and gas flowchart: Gas box and front operation panel Indicator type: Superset Operator switch: Operator access / Orange (Standard) Pressure display unit: MPa / Torr Cabinet exhaust pressure display: Pa No auto shutter Does not include Hard Disk Drive (HDD) 2010 vintage.