二手 TEL / TOKYO ELECTRON Telius SCCM Shin TSP-30555SSS #293795670 待售
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ID: 293795670
晶圆大小: 12"
优质的: 2007
Etcher, 12"
Process gas: C4F6, CH2F2, C3F8, Ar, CHF3, CF4, O2, CO, N2
Load module:
(4) Load ports
SHINKO SBX92101236 Loader arm
PC
Transfer module:
(3) NABTESCO 2L60-000155-11 Transfer arm robots
(3) EDWARDS EPX500NE Dry pumps
Process module:
(3) Chambers
(3) EDWARDS IGX1000N Pumps
(3) DAIHEN HF AGA-5082 RF Generators
(3) Gas boxes
2007 vintage.
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