二手 TEL / TOKYO ELECTRON TSP-305555SSSS #293767179 待售
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ID: 293767179
优质的: 2007
Etcher
Process: Oxide
(5) Loadports
iH160 Pumps:
Chamber position / Gases
Unit 1 / C4F6, C4F8, N2, O2, CH2F2, CHF3, CF4, Ar
Unit 2 / C4F6, C4F8, N2, O2, CH2F2, CHF3, CF4, Ar
Unit 3 / C4F6, C4F8, N2, O2, CH2F2, CHF3, CF4, Ar
Unit 4 / C4F6, C4F8, N2, O2, CH2F2, CHF3, CF4, Ar
2007 vintage.
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