二手 TEL / TOKYO ELECTRON TSP-305555SSSS #293767182 待售
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ID: 293767182
优质的: 2008
Etcher
Process: Oxide
(5) Loadports
iH160 Pumps:
Chamber position / Gases
Unit 1 / N2, Ar, O2, C4F8, CH3F2, CHF3, CF4, C4F6
Unit 2 / N2, Ar, O2, C4F8, CH3F2, CHF3, CF4, C4F6
Unit 3 / N2, Ar, O2, C4F8, CH3F2, CHF3, CF4, C4F6
Unit 4 / N2, Ar, O2, C4F8, CH3F2, CHF3, CF4, C4F6
2008 vintage.
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