二手 TRIKON / AVIZA Celsior #9180428 待售

Atomic Layer Deposition (ALD) systems, 12" ALD Oxide system: BROOKS Gemini express central hub (6) Facets for attachment of process modules (2) Facets for pass through to atmospheric front end Atmospheric front end with BROOKS 3-Axes robot BROOKS Acculine wafer aligner (2) BROOKS BOL TS/M Compatible load port modules 12" FOUP / Manual load SMIF / Manual load, 8" Off-board power distribution Control enclosure for local branch circuit protection Communication hubs DC Power supplies Input / Output hardware Multiple process modules with hot wall reactor chamber Shower head injection system Single zone stage heater Optimized for oxide deposition: 300°C to 500°C Standard PM on board chemical vapor Delivery system with integrated gas block design Argon bubbled canisters for liquid source IBM PC Compatible computer OS With operator interface Data acquisition Recipe creation and storage ALD Process module: Single process module (PM) With hot wall reactor chamber Shower head injection system (2) Zones stage heater optimized for oxide deposition Process module: Nola process module Wafer transfer module SECS / GEM Compliance, 12" (2) Training credits (2) Installation manuals (2) Programmers manuals (2) Operation manuals (2) Maintenance manuals (2) Systems schematics on CD-ROM Options: Signal light tower Ionizer bar System spares and tools: Celsior shower-head swap kit Includes: Load-port handoff buttons Digital MFCs With digital (4 MFCs / PM) Celsior fixture kit: Stage heater calibration fixture Ceramic removal fixture Vacuum viewing fixture included Robot teach fixture.