二手 TRION Phantom III #9039844 待售

RIE / ICP System Bottom electrode: 8” Vacuum port: 6" System controller: Pentium computer, touch screen (6) Mass flow controller gas channels Automatic pressure control Automatic RF tuning of bottom electrode, RF generator: 600 watt 13.56 MHz Automatic RF tuning of ICP coil, RF generator: 1250 watt 13.56 MHz RF generator Cryogenic chuck: 100mm wafer, temperature control, -50ºC to 100ºC Electrostatic chuck: 6", He backside cooling Emergency on/off with AC power distribution box Components: High vacuum Pump: Osaka TG1003BW and Osaka TC1003 controller Backing mechanical pump: none High vacuum valve: VAT 98801-R1 valve Chamber pressure transducer: MKS 627 RF1 Generator: Comdel CX-600AS, RF1 automatch = Trion OEM RF2 Generator: Comdel CX-1250S, RF2 automatch = Trion OEM Heat exchanger: none Chuck heat exchanger: Julabo LH85 Elecrostatic Chuck: Gripping Power EPS200 Gas Controls: Separate exhausted cabinet for gas mixing He backside MFC: MKS 649A, 10sccm Cal’ed for He, used with He Gas 1 MFC: Unit 8100 250 sccm. Cal’ed for N2, used with CF4 Gas 2 MFC: Unit 8100 100 sccm. Cal’ed for N2, used with O2 Gas 3 MFC: Unit 8100 100 sccm. Cal’ed for N2, used with Ar Gas 4 MFC: Unit 8100 250 sccm. Cal’ed for N2, used with SF6 Gas 5 MFC: Unit 8100 250 sccm. Cal’ed for N2, used with CHF3 Gas 6 MFC: Unit 8100 100 sccm. Cal’ed for N2, used with C4F8.