二手 AIRCO TEMESCAL FC 3200 #175666 待售
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ID: 175666
Thermal evaporation system
Dual electron beam
Process chamber: 32" x 32", water-cooled
Flat planetary: 10.6", high speed
Control system: GE Fanuc PLC
Integrated cryo pump regeneration
Process recipe control
Data logging
Onboard flat screen integrated Windows PC
GE Fanuc PLC control system: Windows based PC with keyboard and trackball mouse
General Electric Cimplicity HMI Software
Operator / Engineer computer interface includes:
Data logging of: Ion & Convectron, valves & chamber heat
User level system control
Integrated cryo pump regen control
Process recipe editing
All required software programming
(2) Telemark TT-6, digital display and programmable sweep control
(2) single pocket Temescal electron Beam Guns
5KVA, SCR controlled transformer and fixturing to accept customer specified thermal evaporation boats. Feedthroughs for one resistive thermal source
(3) Separate source shutters for each source
(2) 2kw heater assemblies with feed throughs and temperature control, 4KW total
2 Ion / 4 Convectron gauge
32" x 32" S/S Process chamber (water cooled) with full opening door with viewport
VV-400 viewport with shutter, installed in lower chamber to view sources during deposition process
PLC closed loop pressure control through 02 MFC / Granville Phillips 354
Operational CTI 400 Cryo Pump with CTI 1020R compressor. PLC controlled automatic
regeneration and N2 purge gas heater
Deposition rate monitor using a Maxtek 6 mhz quartz crystal sensor, programmable
(3) planets for (4) 4" inch variable speed single plane planetary system; 12 wafers/run
Separate free standing rack for thermal power supply transformer and TT6 power units
Leybold D-30, 2 stage direct drive 26cfm mechanical pump.
AIRCO TEMESCAL FC 3200蒸发器是一种先进高效的冷却设备，设计用于适应各种商业、工业和住宅应用。该蒸发器具有高效的直驱电机和智能数字温度控制功能,可提供一致冷却的最高性能。该系统以持久耐用的铝结构建造，确保了多年的可靠运行和较低的维护成本。FC 3200使用重型、动态平衡的鼓风机，以最小的噪音产生均匀的流量，使其适合考虑声音的空间。该装置的蒸发器线圈采用高效的鳍片设计，采用耐冷凝铝鳍，后涂料浸入和环氧加工线圈，以确保可靠性。这台蒸发器还配备了微处理器控制器，可以精确控制温度、风扇速度和其他设置。AIRCO TEMESCAL FC 3200设计简单易用，具有集成计时器、数字回流防护器、内置空气净化器等多种操作特性，确保空气一致、优质。这台机器还设计用于易于维护,具有易于访问的组件,便于访问和清洁。FC 3200还配备了安全功能，确保无忧操作。该工具采用高压切断开关、压力传感器和单独的低压开关，以确保安全可靠的运行。此外,该蒸发器还配备了一个非易失性固态旁路开关,可控制风扇速度,同时保持蒸发器性能。AIRCO TEMESCAL FC 3200设计为节能、节省成本。这种蒸发器设计有一套隔热分离线，防止冷凝物积聚，以节省能源和降低成本。该资产还配备了优化的鳍片间距，以实现更好的传热和更少的能量损失，最大限度地提高效率和性能。总体而言，FC 3200是一种可靠高效的蒸发器模型，适用于任何商业、工业或住宅应用。该设备具有耐用的铝结构、高效的鳍片设计和智能数字温度控制功能,可提供可靠的性能和经济实惠的节能效果。
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