二手 BALZERS / EVATEC BAV 1250 #293748051 待售
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ID: 293748051
Evaporator
630 Diffusion pump
Baffle freon
DUO 120 Primary pump
WKP 1000 Root
POLYCOLD PFC 1102 HC
Water panel with digital flow meter
Quartz head 6-positions
EHV 212 Electron gun 6-position, Voltage: 14 kW
Mark II Ion gun
Infrared heater under substrates, Voltage: 4 kW
Joule-effect source
MFC Oxygen inlet
Substrate holder diameter: 1250 cm
Spare parts:
EHV 212 Power supply complete with EFS and ECS
Gun turret 6-position
EHV ECS EFS Control cards
Electron gun emitter
Substrate holder sector
(2) Protection plates.
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