二手 BOC / TEMESCAL FCE 2700 #293731083 待售

製造商
BOC / TEMESCAL
模型
FCE 2700
ID: 293731083
晶圆大小: 3"-6"
E-Beam evaporator, 3"-6" Process: Ti / Al TRC 3460 (6) pockets TEMESCAL Gun control TEMESCAL Sweep Control Simba 2 / 10kV Substrate holder, 3” (47 wafers) Rate controller: INFICON XTC/2 EDWARDS E2M80 + roots EDWARDS EH250 CTI-CRYOGENICS CT-10 onboard (chamber) CTI-CRYOGENICS CT-8 (source) MFC gas: Argon No loadlock Automatic gold feeder Cryogenic compressors are missing.
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