二手 CHA E 1000 #9203953 待售
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ID: 9203953
E-Beam evaporator
Non load-lock system:
Minimum (4) target pockets
Load-lock system:
Minimum (6) target pockets
Ion mill capability with argon
Ion beam power: 10kW
Capable of handling batch sizes: ≥ 3"x 6" wafers
System base pressure: 3x10^-7 Torr
Chamber pump down rate to base pressure: Under 60 minutes
Lift off dome and planetary holder
Wafers that is easily switched out
Multiple recipe system controller to auto control deposition rate
Load lock preferred
CPA E-1000 evap system featuring:
Load lock: No
(4) Pockets crucible (25CC) with indexing controller
TEMESCAL CV-14 14KW E-beam power supply
Controller: GP 307 I.G
Shutter assembly
INFICON Deposition sensor assy
Observation port
Lift-off fixture
One button operation:
CHA controllers
TELEMARK 880 / 861 Dep rate controller
TEMESCAL Sweep controller
CTI CT-10 Cryo pump with 8500 compressor
Mech pump
EOM Specifications
Shielding
System manuals on CD
Specification:
O-rings
Chamber
CV-6S Power supply
Valves
Bearings
Cryo pump and compressor
System leak checked using RGA
All controllers inspected and
Wiring checked and problems
Shielding and planets
Options:
Ion mill
Rear mount
CV-6 PS With ps
Rewire
TELEMARK ST-10 Power supply
5CM Ion gun with power supply.
CAE 1000是为工业制冷应用而设计的高效蒸发器。它是一个紧凑的单级机组,在氨中容量高达1000 kg/h,在丙烷中容量高达850 kg/h。蒸发器由一个不锈钢主体和一个铜管/铝管板在头部构成,允许较低的维护和更好的耐用性。此外,E 1000还采用了多通道制冷剂膨胀设备,提供了更好的过热控制和更高的传热效率。蒸发器具有先进的功能,例如电子换向(EC)风扇马达和减声外壳,以降低噪音水平。EC风扇马达提供可调节的速度,以更好地控制系统的运行。这有助于优化能效,也消除了启动和停止风扇马达的需要,因为它简化了调试程序和维护操作。减声外壳可降低3dB (A)噪音,使CAE 1000达到或超过噪音污染准则。蒸发器设计有不锈钢内部管道单元和热膨胀阀,以便更好地控制制冷循环。用于增强传热和制冷剂与废气最大表面接触的交错管布置也提高了热效率。蒸发器还设计有可安装的架子框架,可用于油箱、蓄能器和干燥过滤器等其他部件。E 1000采用各种连接端口和附件设计,可灵活安装并简化机器维护。此外,在2.2巴的最大操作压力下,该设备可以在要求苛刻的环境中安全可靠地运行。总体而言,CAE 1000是一种先进的蒸发器,专为最高效率和寿命而设计,即使在最苛刻的工业制冷应用中也能提供可靠的性能。
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