二手 CHA Mark 40C-RH #9390229 待售
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ID: 9390229
E-Beam evaporator
Dual operation
Moving substrates
Exceptional Film Uniformity (EFU)
Sputter up
Process stations
Round cathodes, RF or DC (Up to 4-stations)
Co-deposit
Bias, RF or DC
Substrate heating, 400°C, multi-element
Substrate heating station
Electron beam
Thermal
Ion beam pre-clean / Etch
Plasma texturing/etch
Cryo coil: 1,000 L/Sec
Process chamber
Insitu spectrophotometer
Drop well source
Easy access to front and rear door
Variable source-to-substrate distance
Utilities
Water supply, 10 GPM
Air supply, 85-125 PSIG
Deposition fixturing adjustable angle planet
Vertical drum with pallets
Rotating disk
Rotating dome
Flat planetary
Shutter
Pumping stack
Dry or oil sealed roughing pump
Regeneration options
Famous right angle pumping/plumbing
Exceptional pumping performance
High vacuum valve, vertical seal, 16"
Foreline and roughing valves, vertical seal, 3"
Large refrigeration vapor pumping options
Mechanical pump, minimum CFM
Molecular sieve trap
Cold trap LN2, 25L pump trap, optional water pump
LN2 level control
Ionization gauge control
Gas controls
Pumping options:
Cryo
Turbo
Diffusion
Ultimate vacuum:
System: 10^-9 Torr
Chamber:10^-8 Torr
Power supply options:
Electron beam: 6-10-15 kW
Sputtering: 1-3-5-15-30 KW
Heater: 6-10-16 kW
Thermal deposition: 1-5-10 kW.
CHA Mark 40C-RH蒸发器是一种可靠、高性能的工业蒸发器,设计用于各种工业冷却和干燥过程。该单元采用单级设计,外壳结构清晰,便于访问,维护最少。蒸发器具有400升的容量,整体高度为1270mm,工作温度范围为-20°C至+65°C。蒸发器利用先进的轴向风机产生高质量的空气运动,以快速、高效的冷却过程。同轴设计通过蒸发器壳体供应空气,由单独的风扇产生水平流动,以保持空气高速流出。空气的流量是可调的,蒸发器利用R 22和R134a制冷剂来最大化效率。蒸发器还具有独特的自洁系统,在蒸发器内部清除灰尘和其他颗粒后,才能成为空气。CHA MARK 40C RH蒸发器还具有广泛的安全特性,如可调节的温度和压力安全开关,以及紧急关机和报警功能。蒸发器安装方便,紧凑的设计需要最少的空间。蒸发器高效可靠,设计用于低维护操作。总体而言,Mark 40C-RH蒸发器是工业冷却和干燥应用的理想蒸发器,提供可靠的性能和高效的冷却过程。
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