二手 KHF CO. 1854 #70862 待售

Box thermal evaporator, 32" Includes 32" dia x 30" tall cylindrical back stainless steel chamber with full opening, hinged, o-ring sealed door with 6" ID viewport The pumping system consists of a Varian VHS10 high speed diffusion pump rated at 5300 l/s, a Varian 330 water cooled baffle, pneumatic vane style throttle valve, electropneumatic valves with sequencer and an Edwards E2M80. 57 cfm, two stage direct drive mechanical roughing pump. The evaporative system includes dual 5 KVA filament transformers with SCR controller and ammeter, two pairs of high current feedthroughs with shutter, 30" diameter domed substrate holder with motorized horizontal plane rotation and speed control, glow discharge power supply. 7KV @ 700ma, 4 kw quartz lamp substrate heaters with control and timer, Sloan Omni III quartz crystal deposition controller. A cold cathode discharge and two position thermocouple gauge are also included.