二手 USHIO UFX-2259B-AMB01 #9375525 待售
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ID: 9375525
优质的: 2009
Exposure system
Shutter unit:
Exposure area, P/N; 2317-3246
Mask light source
Optical parts:
Light collecting mirror, P/N: 2306-3208
Plane mirror, P/N: 2836-7583
Projection lens, P/N: UPL-59EX
Microscope, P/N: 1000051733 / 3185-0361
Workpiece stage:
Beam splitters, P/N: 1000049959 (43.5)
Beam splitter, P/N: 1000029070 (11.5)
Motor unit (X, Y, Θ), P/N: 3026-0870
Work stage units:
Drive shaft pressure wheel unit
Drive shaft unit
Brake shaft unit
Clamp unit
Vacuum suction plate
Anti-uplifting press wheel group
Illumination / Microscope: Light cover light source gate
Micrometer (Precision sliding table), P/N: MHS2-13
OMROM Rotary encoder, P/N: E6B2-CWZ6C (2000P/R)
Reel receiving and discharging mechanism:
AC Motor, P/N: VHR206AGVJ / GV2G250
AC Motor, P/N: 2TK3GN-AGN25K
Clutch, P/N: AMC-40
(6) Drive / Brake units:
MATSUSHITA AC Servo motor (Drive unit), P/N: MSM5AZP1A
MATSUSHITA Motor driver (Drive unit), P/N: MSD5A1P1EA
Clutch, P/N: AMC-5
Piping units:
SMC Solenoid valve workpiece blow, P/N: VCW31-5G-2-02-V-B-X41
SMC Solenoid valve workpiece vacuum, P/N: VP542R-5GZ-03A-F
SMC Solenoid valve workpiece vacuum, P/N: VCW41-5G-4-02-V-B-X27
SMC Solenoid valve workpiece vacuum, P/N: VCW3134V-02-5GS-B
PCB:
USHIO Auto micrometer, P/N: PB-1026B
USHIO Motor interface, P/N: PB-1017B
USHIO Motor interface, P/N: PB-1018B
USHIO Rotary encoder I / F, P/N: HC ENC I/F
USHIO Shutter control, P/N: PB-1040B
NDG Switcher, P/N: PB-1028B-U00
Video IN, P/N: RICE-001
Video OUT, P/N: PLUM-001
MELEC Motor control, P/N: C-864V1
Screen / Peripheral:
KEYENCE VT-7S Touch panel display
AU Positioning visual screen
Mouse for visual teaching
PLC:
MITSUBISHI CPU Unit, P/N: Q06HCPU
MITSUBISHI Serial data unit, P/N: QJ71C24-R2
MITSUBISHI 64-Point IN unit, P/N: QX40
MITSUBISHI 65-Point OUT unit, P/N: QY50
MITSUBISHI 2-Axis positioning unit, P/N: QD75D2
MITSUBISHI High speed counter, P/N: QD62D
MITSUBISHI Memory card, P/N: Q2MEM-8MBA
MITSUBISHI QJC1724N
MITSUBISHI QJ61BT11N
Internal wiring; Sensor line / Communication line
PC Host: AUPC
Air mount: (4) Balance air cushions
ULVAC DA-60S Vaccum pump
Static elimination: Ion gun
Air conditioner
2009 vintage.
USHIO UFX-2259B-AMB01是一种精密光学曝光设备，设计用于半导体和精密光学工业。它采用领先技术构建,为用户提供可靠和高性能的曝光功能。曝光系统具有场发射电子枪组件，使其能够产生极高分辨率和可重复曝光。场发射电子枪可以产生能量范围为1-30kV的电子束，对暴露剂量水平提供极好的控制。这一特性确保了通过最小扩散和电子散射来实现精确曝光。UFX-2259B-AMB01还具有高精度晶圆扫描单元。扫描机由步进电机和步进驱动器组成，用于以可编程速度扫描晶圆。此功能可实现高速和高精度晶片扫描,从而实现精确的曝光模式控制。此外，该工具还配备了加热气体扩散室，确保了对气体扩散的精确控制。气体扩散资产确保晶圆上均匀的B因子，无论晶圆大小或暴露剂量变化如何。这一特性对于生产具有极小特性的高精度晶片尤为重要。还包括一个集成的真空提取模型，提供了最优晶片加载和卸载。提取设备用于抽取暴露系统留下的任何颗粒、污染物或其他残留物，确保晶片不受污染。最后，USHIO UFX-2259B-AMB01单元配备了计算机控制的接触曝光处理器。接触曝光处理器使用户能够编程曝光参数并在曝光后检查晶片。此功能有助于确保结果可重现且一致。总体而言，UFX-2259B-AMB01是一个强大和可靠的曝光机器，旨在提供最大程度的曝光精度和可重复性。其特点确保高分辨率和均匀的暴露，同时消除任何污染风险。因此，它是半导体和精密光学应用的理想选择。
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