二手 EATON NOVA / AXCELIS GSD 200E #9209411 待售
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ID: 9209411
晶圆大小: 8"
优质的: 1995
Implanter, 8"
Upgrade kit from 80 KeV to 160 KeV
Parts included:
P/N / Description
2200109 / Hvps dual output -5kv glassman (mnl 8101410)
- / Red housing, nv-gsd-200e, rated for 160 kv operation
1204990 / Arc power supply mod nv20a
1204990 / Arc power supply mod nv20a
1204990 / Arc power supply mod nv20a
1199240 / Dis 58900 fld rpl only disk faraday assy gsd-200
17335010 / (2) Ground electrodes
17021871 / (2) Aperture vgi electron showers
3100353 / Pump turbo tmp 1000c 250 1so-k/kf40
3100353 / Pump turbo tmp 1000c 250 1so-k/kf40
- / Module controller turbo pump scu-1000c
2200114 / Hvps – 5kv 20 ma del elect
1190160 / Plasma shower gun assembly
17121720 / Graphite shield e-shower
17335030 / Ground electrode
1141471 / Faraday flag assy vitreous graphite
1181490 / Sce rgh valve v8
3500087 / O-ring -216 buna
17C5290 / Mo knob bolt
17C2983 / Set screw molybdenium
17D6405 / Cathode electrode
1766531 / Plt burn thru (vt1)
17E9560 / Feed through bracket
17E9561 / Bracket
3500496 / O-ring -208 viton
5000132 / Stdf 3/8lx3/8x6-32 rnd cer hhs
17121850 / Repeller insulator
17304680 / Shower tube aperture ii pef-xe gsdiii/led
17067300 / Cover terminal
17100170 / Corona ring
1710831 / Cover, terminal box
17071160 / Cover, terminal plate
17067720 / Cover plate, (3) screws
17081180 / Cover
17068520 / (2) Brackets, angled
17071130 / Cover, red box
17071140 / Cover, red box
17074820 / (2) Covers, flexs
17022381 / (5) Shim insul 1/16 terms nv20
17072382 / (2) Shim insul 1/32 terms nv20
E17022380 / (2) Shim insulator terminals
4001587 / (2) Knob four arms clamping 5/16-18 unc
1199850 / Terminal exh kit
17051500 / Rp1 exhaust kit
1185620 / Terminal exh kit
1837180 / Alignment tools els
1833870 / Alignment tools els
17244920 / (3) Cover lower plasmas
17249760 / (2) Cover upper plasma showers
- / Scu-1000c turbo pump controller
17D1284 / (2) Nozzle retainers
11032780 / (3) Assy src housing sprt flag shields 11b3641
17150050 / Supp rack
17063520 / (2) Supp racks
17095870 / (2) Supp racks
17120370 / Supp rack
17091650 / (3) Supp racks
TUBE / (4) Supp racks
17103190A / Fil power dist
1168893 / Electron shower iv power supply
1168200 / Source di controller
1168201 / Source di controller
17080520-A / Lead shield
1169724 / Air distr. manifold
1184260 / Filter box
17127550 / Source alignment tool
1190500 / Electromagnetic reflector assy
1745100 / Source magnet assembly
17099070 / Cover
17095340-C / Feedthrough manifold
17324630 / (2) Insulator manipulator leds
1181831 / Faraday flag assy vit gr
- / Various blank-offs plates
1181831 / Faraday flag assy vit gr
17E3662 / Front slit (w)
17S2467 / Disk
17128680 / Block
RP1 EXH / RP1 Exhaust kit
- / Accel suppression electrode
- / (3) Various graphites
- / Various graphite
- / Source main alignment fixture
- / Vra cylinder, led ultra
- / Edwards valve
- / Edwards cable
300302720 / Ckd valve
- / Edwards vacuum gauge
- / Cooling block
- / Chamber end plate
17092060A / Roof panel, 67 cm x 87 cm x 1.5 cm
17092040C / Roof panel with exhaust cutout
17092020B / Roof panel with small exhaust cutout
17092030B / Roof panel with exhaust cutout, 120.5 cm x 67cm x 1.5 cm
17092050A / Roof panel, 120.5 cm x 67 cm x1.5 cm
17092070B / Roof panel with exhaust cutout, 120.5 cm x 67cm x 1.5 cm
17092505B / Angled roof panel with exhaust cutout, 50x28, 183x120
17092XXXX / Angled roof panel with square cutout
1707075XX / Door panel, l front 175.5 cm x 97 cm x 2.7 cm
170707XXX / Door panel, l rear 175.5 cm x 97 cm x 2.7 cm
17065501G / Door panel, 175.5 x 97 x 2.5
170XXXXX / Door panel, 175.5 cm x 81 cm x 2.7 cm
170X2540B / Door panel, 175.5 cm x 81 cm x 2.7 cm
17065501G / Door panel, 175.5 cm x 97 cm x 2.7 cm
170XXXXX / Angled roof panel, 36.5 + 56 + 19 x 184 + 179.5 + 128.5 26.8 cm
170XXXXX / Angled roof panel, 50+28 183 (120)
17079780C / Extraction electrode shield, 62.5 cm 35 + 8 cm
17092600-D / Implant internal shield, 45.5 x 75.7 x 04
170XXXXX / Lead shield, 63.3 cm x 198 cm x 0.5 cm
1709XXXX / Door panel, 175.5 cm x 97 cm x 2.7 cm
17065480C / Terminal corner beam, 196.6 cm x 7.5 + 4.7 cm
170XXXXX / Terminal corner beam, 196.6 cm x 7.5 + 2.5 cm
170XXXXX / Terminal corner beam, 196.6 cm x 7.5 + 2.5 cm
170XXXXX / Terminal corner beam, 196.6 cm x 7.5 + 2.5 cm
170XXXXX / Door panel, 175.5 cm x 81 cm x 2.7 cm
170XXXXX / Door panel, 175.5 cm x 97 cm x 2.7 cm
17092540 / Door panel, 175.5 cm x 81 cm x 2.7 cm
170XXXXX / Door panel, 175.5 cm x 97 cm x 2.7 cm
17065501G / Door panel, 175.5 cm x 97 cm x 2.7 cm
1179030D / Back of terminal, 194.5 cm x 223 cm
1XXXXXXX / Front of terminal, 223 cm x 194.5 cm
1XXXXXXX / Front panel, 134 cm x 110.5 cm
170XXXXX / Earth rod
17075120X / Earth rod
1995 vintage.
EATON NOVA/AXCELIS GSD 200E Ion Implanter&Monitor是一种高功率、高精度的设备,专为将离子植入材料而设计。该设备具有广泛的选项和功能，旨在从各种材料生产出完美的晶体管、集成电路和其他微电子元件。该设备配有一系列可调节的工艺参数和设置，允许各种离子植入配方。它可以容纳不同的离子种类、电压、电流和晶圆大小，使其适合广泛的植入项目。AXCELIS GSD 200E Ion Implanter&Monitor是一种交流电源设备,能够接受高达60kV的直流高压。它配备了高速、高电流的电子枪，能够以高达1000离子/秒的速率植入离子。它还具有冷却的水冷界面，以避免因离子加热而对零件造成污染。较大的EATON NOVA GSD200E支持水平轴和垂直轴的形成以及离子的同时植入。这使得它可以提供均匀剂量和深度控制，同时产生最高纯度的可用材料。其在线监视器提供对离子植入过程的实时监控，使用户能够根据期望的结果调整参数。此外，该设备还配备了先进的分析模块，通过自动识别错误并提供避免错误的算法来优化植入过程。该装置符合所有安全标准，因为其目的是减少人员和设备受到伤害的风险。由于设备由PC控制,因此可以从世界任何地方远程操作。最后,GSD200E Ion Implanter&Monitor具有多种功能,使其成为同类产品中的顶级产品。其先进的系统能够快速准确地将离子植入广泛的材料中，其实时监控系统使用户对其操作得到了充分的控制。它结合了精确度、精确度和安全性，成为离子植入操作的首选。
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