二手 EATON NOVA / AXCELIS NV 8250HT #9366390 待售

Implanter Vacuum system: CTI-CRYOGENIC 9600 Cryo compressor OB 8 Beam line cryo pump (2) OB 8 Process cryo pumps STP1003C Source pump STP301C Beam line turbo pump STP1003C Beam line turbo pump Vacuum controller: HCIG End-station: Cassette capability: 2-Cassette Wafer size: 8" Wafer notch alignment: Automatic notch alignment capability Wafer handling system: In-air / In-vacuum high throughput Particle filter system: Class 1, UPLA Filtered wafer handling system Implant angle capability: Quad implant Real-time beam profiler (Single dimension) Tilt axis: 45° Twist axis: 360° Beam monitoring system: Real-time patented dose control Chuck: Electro-static clamp Chuck cooling interlock ASYST LPT 2200 SMIF Interface Chiller E-Clamp E-Shower controller and power supply unit Flag faraday relay box Beam profiler card include external box DSP Motor controller CP1 Pump Dosimetry frame include side cup and P-Cup Cell controller Aligner assembly CPU Tx Arm include pneumatic assy Oscilloscope FFU Terminal: Four string gas box: Gas box option: Modular gas box High pressure string (2) SDS String hydride: Arsine and phosphine SDS String fluoride: Boron trifluoride (3) Pressure transducer on SDS string (Per string): PSIA Mass flow controller: UNIT 1660 (3) UNIT 1662 Extraction voltage monitor: 0-40 keV Vaporiser Ion source: ETERNA Extended Life Source (ELS) Source bushing: Extended life bushing Extraction electrode: (3) Axis extraction electrode AMU System: Triple indexed mass analysis magnet and power supply Beam shutter Beam line quads beam focus and scanner P-Lens power supply: 0-68 keV Decel power supply: 0-40 keV Accel power supply: 0-142 keV Terminal transformer: Oil-cooled transformer Angular energy filter Energy slit Beam profiler with P-cup Flag faraday with side cups Cathode power supply unit Filament power supply unit Arc power supply unit Source controller (3) Turbo pump include controller / Harness Ext electrode assy Source and cooling flange Source magnet power supply unit High resolution scanner scan generator DI AMU Power supply unit Terminal PD DI Beam Shutter DI: Dose DI Terminal beam line DI: General IO DI Gas box DI Ground interface DI: Terminal DI Disk thermocouple DI: TC Di (4) IG Controllers and cables HV Supply power supply unit Extraction power supply unit Quad power supply unit Right scan amplifier Digital tesla meter Scan suppression power supply unit Accel power supply unit Decel power supply unit AEF power supply unit Charge control technology: E-Shower NESLAB / AFFINITY Chiller Control UPS Main isolation transformer Smoke detector Exhaust flow switch Water leakage sensor Light tower SECS I and SECS II Protocols GEM Interface Ethernet ports IG and TC Gauge 2000 vintage.