二手 EATON NOVA / AXCELIS NV GSD 200E2 #9224295 待售

High current ion implanter, 8" 180 keV SMIF System: ASYST LPT2200 SMIF Interface capability Hardware configuration (Subfab / Auxiliary units): Cryo compressor Disk chiller Vacuum system: Cryo compressor 1: CTI-8200 (P2) Cryo compressor 2: CTI-9700 (P3) Beam line cryo pump 1: OB 8 ( P2 ) Beam line cryo pump 2: OB 10 (P3 ) No process cryo P9 Source pump: STPA2203C ( P1 ) No AMU Turbo pump Terminal rough pump: EBARA Pump 40x20 ( RP1 ) Endstation rough pump: EBARA Pump 40x20 ( RP2 ) Vacuum controller: HCIG End station: (4) Cassettes Wafer notch alignment: Automatic notch alignment capability with buffer cassette Dummy wafer: Integrated dummy wafer fill-in capability Wafer handling system: In-air / In-vacuum high throughput wafer handling system Particle filter system: Class 1, UPLA filtered wafer handling system Implant angle capability: Two axis variable implant angle (+/- 11 deg in two axes) Quad implant capability Process disk spindle: GSD Series belt drive process disk With active cooling and external close loop chiller Beam monitoring system: In situ beam potential monitor Real-time patented dose control Real-time beam profiler (Single dimension) Process disk: Silicon coated process disk (UHD Small radius fence) Process disk cooling interlock Gas box options: Modular gas box (4) String gas box options High pressure string (2) SDS String hydride (Arsine and phosphine) SDS String flouride (Boron trifluoride) (3) Pressure transducers on SDS string: PSIA Mass flow controller: 1660 Kit (3) 1662 Kits Extraction PS: 0-90 kV Extraction voltage monitor Vaporiser Ion source: Eterna ELS (Extended life source) Source bushing: Extended life bushing Source liner for extended life bushing N2 Purge: Bypass valve and nitrogen purge Extraction electrode 34 Source injection kit AMU System: Triple indexed mass analysis magnet and power supply Post accel PS: 0 -90 kV No post accel electrode Terminal transfomer: Dry transformer Bias aperture assy Flag faraday Charge control technology: Secondary electron flood gun: PEF Closed-loop cooling system selection: Cooling system: Single loop affinity chiller Control UPS Main isolation transformer Abatement system: EGS237 Novapure Smoke detector Exhaust flow switch Water leakage sensor Light tower No real time particle detection system Advanced automation package: SUN SOLARIS Operator workstation: Hard drive, 21" monitor SECS I and SECS II Protocols GEM Interface and ethernet ports CIM Linked Missing parts: Gauss probe / Controller Arm servo motor assemble Wafer handler / Gyro controller Cryo controller interface Cell controller part Extraction electrode board MFC Interface board Source assembly Post stack assembly.