二手 EATON NOVA / AXCELIS NV GSD-HE #9195914 待售
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已售出
ID: 9195914
晶圆大小: 8"
Ion implanter, 8"
SUMITOMO EATON NOVA End station
Source / Injector region: ELS
Electrode assembly: SEN
Gas channels: Ar, BF3, PH3, AsH3
High pressure gas
Injector PD / DI
S.Control DI
Filament PS
Cathode PS(ELS)
Arc PS
Extraction HVPS
Suppression PS
Vac gauge controller
Analyzer magnet PS
Source magnet PS
Injector electronic DI
Gauss controller
S.Turbo/Controller
S.Gas control DI
Beam guide assy
Source gate valve
High voltage stack
Hall probe
Injector beamline DI
Injector Faraday
RP1 Pump
Isolation tank
Vaporizer: No
Analyzer turbo/Cont: No
Linac region:
AC PD Box
RF PS
Resonator can
Pneumatic control box (1&2)
Turbo pump: STP-H600C
Control: Yes
Cooling tube
RF Generator
FEM Control DI
Quad PS
Vacuum controller
Roughing pump (RP4)
Gauss meter / Probe: 1157450 / AXCELIS
Magnet DI
Wire harness
Quad assembly
Resolving housing region:
Electron shower assy
Gyro control DI
In-Air control DI
Loadlock control DI
Electron shower PS
Robot control DI
Cryo pump (P2,3,9)
Wire harness
Cell controller
Flag Faraday
Cryo compressor
Roughing pump (RP2)
Data link hub
Cryo on-board DI: No
End station region:
Rotary drive motor
(4) Cassette tables
Disk W/spare
Rotary drive DI
Y-scan control DI
HCIG Controller
Cassette door
Disk TC control DI
In-Air robot W/chuck
Dose control DI
Flat aligner
Dummy buffer
Vacuum cassette
Resister box
Cassette stand
Load buffer
In-Vac arm
Laminar flow hood
Clamp
Wafer holder
Sun workstation
Disk removal tool: No
Ground region:
Main PD DI
Triple loop chiller
UWX30
Oscilloscope
Smoke detector
Power cable: No
Work table: No
Sun workstation: No
(2) Laminar flow hoods
Outer door
Panels:
Loop panel
Outer enclosure panel
Lead panel
Endstation glass panel
Floor
Manual / Drawing:
Operation manual
Maintenance manual
Endstation align manual
Calibration manual
Original vendor manual
System drawing.
EATON NOVA/AXCELIS NV GSD-HE是一种高性能的离子植入器和监视器。植入器利用植入技术的最新技术,为用户在植入离子时提供卓越的性能和控制。GSD-HE还配备了高精度的监控设备,以确保准确性和安全性。AXCELIS NV GSD HE的核心是其实施系统。这个单元使用高效的离子源,能够将离子加速到高达500 keV的能量。这种能量足以将离子植入各种材料的表面。离子植入器还具有几种不同的镜片,以确保精确和均匀的植入。此外,GSD-HE配备了可调快门,允许用户精确控制释放的离子量。GSD-HE还设有若干监测系统。这些系统旨在检测机器性能的任何偏差,并提供离子电流、光束不稳定性、污染和其他变量等植入参数的准确读数。监视器还将这些值记录在实时日志中,可以查看或下载这些值以供将来参考。EATON NOVA NV-GSD HE也能够执行各种其他操作。例如,植入器可以被编程为拒绝具有某些特性的粒子,从而可以富集所需的目标粒子。它还具有改变能量和植入率的能力,允许用户定制植入器以满足其特定的应用要求。而且,GSD-HE可以用于不同类型的等离子体加工,如PECVD、PACVD和金属有机化学气相沉积(MOCVD)。GSD-HE还配备了多种安全功能。它通过检测任何异常操作的传感器阵列监视植入器的性能。该工具还具有一个紧急停止按钮,可用于在紧急情况下快速关闭资产。总之,EATON NOVA NV GSD/HE是一种先进、高度可靠、用途广泛的离子植入器和监测器。GSD-HE为用户提供卓越的性能、精确度和安全功能,使其成为各种应用程序的理想选择。
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