二手 NISSIN EXCEED 3000AH #293677473 待售
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ID: 293677473
晶圆大小: 12"
优质的: 2005
Medium current ion implanter, 12"
Transformer
Compressor
Indirect Heating (IHC) Ion source
Loading chamber
End station: PFG (Plasma Flood Gun), Xe Gas
Ion beam energy reduction system
(4) Load ports
Gas box: BF3, PH3, AsH3, Ar
Wafer target disk: water cooling
Pump:
(3) EBARA Dry pumps
ADIXEN Diaphragm pump
(3) SHIMADZU Molecular pumps
(4) ANELVA Cold pumps
High vacuum pump
Wafer target stage:
X-Tilt
Y-Tilt
Twist three-way sports capabilities
Vacuum system indicators:
Ion source, 5E-7Torr
Beam line, 5E-7Torr
End station, 8E-7Torr
Cooling water system:
DI Water loops
PCW Heat exchange
Deionization filter
Departiculate impurity filter
Label:
Display
Wires
Controller
Power connection
Host control system:
LCD monitor
Backup dual hard disk
2005 vintage.
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