二手 SEN / SUMITOMO EATON NOVA MC3-II #293819953 待售
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ID: 293819953
晶圆大小: 8"
Medium current implanter, 8"
Robot controller is currently non-functional
Decontamination system, IG103
Process gases: Ar, PH3, AsH3, BF3
Missing parts:
Robot controller
Cathode power supply
Filament power supply
Monitor
RP3
Ion gauge controller (cable)
L/R side cup BNC cable
Source filament power supply.
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