二手 VARIAN VIISion 80 #9162800 待售

Ion implanter, 8" L/L Dry pump type: VARIAN Tri scroll pump Source / Beam line turbo pump: PFEIFFER TMH1601P LEYBOLD MEG W1300 L/L Turbo pump: VARIAN V250 Process chamber: (4) CTI 250F Cryopumps Gas channel 1: AsH3 Gas VCR 1/2" high pressure Gas channel 2: PH3 Gas VCR 1/2" high pressure Gas channel 3: Ar Gas CGA580 high pressure, UFC-8160 Gas channel 4: BF3 Gas CGA330 high pressure, UFC-8160 PFG Gas: Xe Gas CGA580 high pressure, UFC-8160 Memory upgrade: Yes Main CB: 90 Amps CVCF CB: 50 Amps Auto disc angle motor: Yes Host: SECS Throughput (WPH): N6, 230 WPH Disc site type hook site: (13) Sites Elevator type modified 25 Lower slide pin: Yes Laser align kit: No W/H align kit: No Remote pallet: No Utility supply type: Bottom Power 208 VAC, 3 Phase, 5 wire, 50/60 Hz, 35 kVA Water: 40~100 psi Air: 90~125 psi PN2: 50~100 psi GN2: 50~100 psi Exhaust: 1600 cfm Missing parts: (4) Gasbox bushings Source head assembly Arc chamber assembly Vapour end cap plate Gas line Dip seal pump Beamline turbo pump set Turbo pump Power cable Controller Terminal RDAC board Analyzer gauss probe Rotary slit assembly Remote rack DI Colling system PCW Manifold (2) Cryo compressors (2) Dry pumps: IQDP 80 Remote rack accesory End station turbo pump set Signal tower External AC filter Disc assembly Spin drive assembly Main drive shaft stand plate Main drive shaft Spin magnet assembly Rotary union Resolver shaft assembly Encoder shaft assembly Main pulley (2) Resolvers / Encorder pulleys (2) Belts Spin magnet guide plate (8) Plate stand blocks (2) Spilcover cup cooling bellows Currently de-installed and warehoused 1995 vintage.