二手 VARIAN VIISta 80 HP #9357814 待售
看起来这件物品已经卖了。检查下面的类似产品或与我们联系,我们经验丰富的团队将为您找到它。
单击可缩放
已售出
ID: 9357814
High current implanter, 12"
PC, P/N: E11130730
VESDA Smoke detector
Water leakage sensor
CVCF PD, P/N: E19009490
Remote rack
Lead floor
Service monitor
Input power: Bottom supply
Vacuum system:
(2) CTI-CRYOGENICS 9600 Cryo compressors
(3) CTI-CRYOGENICS 250F Cryo process chambers
(2) PFEIFFER TMH 261 YPX Load lock pumps
STP-A2203C2 Source turbo pump
With SCU1500 controller
STP-A2203C2 Beamline turbo pump
With SCU1500 controller
IGX100M Source rough pump
IQDP80 End station rough pump
IQDP80 End station diff pump
End station (UES):
BROOKS Buffer type
Graphite air bearing, P/N: E19282790
Y-Tilt type: Driven side encoder
Cassette platform, 12"
Wafer mapping: Thru beam
Wafer walkout sensor
Cassette sensor present
Tilter head: Roplat
IN-VAC Profiler assembly, P/N: E11313830
Light curtain
Load lock
BROOKS / PRI AUTOMATION Robot (Left robot removed P/N: E40001450)
Signal tower
Scan harness
Process module controller
Transport module controller
Source and beamline:
Energy probe
Ion source
Filament power supply
Arc power supply
Bias power supply, P/N: E19013050
Source magnet power supply, P/N: E11106220
High and low extraction power supply
Extraction Suppression power supply
70° Magnet power supply, P/N: E19007880
90° Magnet power supply, P/N: E19007880
(2) Decel power supplies
Decel 1 suppression
Quad 2 power supply, P/N: E19283050
70 and 90 Rod controller
Exhaust conductivity monitor
Gas box: P/N: E11140710
(5) Gases:
Gas / Part number
Gas 1 / E11116732
Gas 2 / E11147261
Gas 3 / E11147241
Gas 4 / E11147251
Gas 5 / E11116782
Missing parts:
Qty / Part number / Description
(1) / PAA-003B_CE50CBD3 / Platen chiller
(2) / E11290090 / Manipulator controllers
(1) / E11084150 / Beam gate assembly
(1) / E15003820 / Suppression interface PCB
(1) / E11320430 / Orient assembly
(1) / E40001450 / BROOKS / PRI AUTOMATION Left robot
(1) / E11368067 / ESC Platen
(1) / E1133573 / Bipolar switch box
(1) / E11320190 / QUAD 2 Lens assembly
(1) / E1132601(1) / D2 Suppression power supply
(3) / E11292270 / ADIO
(1) / E11092090 / PFG Controller
(1) / E11061452 / Scan motor assembly, rail
(2) / - / L/P Clamp assemblies
(1) / E16135690 / ARC Power supply cable
(1) / 354019-TD-T / IG2 Gauge
(2) / 354019-TD-T / IG3 Gauges
(1) / E33000206 / G2 Gauge
(1) / E33000206 / G3 Gauge
(1) / E33000206 / G10 Gauge
(1) / E1106196 / Aperture, variable assembly, 12"
(1) / E11117460 / Left loadlock vent assembly
(1) / E11076570 / Setup cup current monitor
(1) / E11130962 / Twist motor and cover
(1) / - / INVAC Profiler interface board
(1) / - / PFG Assembly
(1) / - / Servo gemini controller
(1) / - / Wafer orient
(1) / - / Platen
(1) / - / Decel 2 suppression, P/N: E11326011
(1) / - / Gas stick #6
(1) / - / Vaporizer
2004 vintage.
VARIAN VIISta 80 HP Ion Implanter&Monitor是一种用于半导体光刻的高功率工具，用于将离子沉积到基板中。这一过程被称为离子植入，用于制造集成电路、光伏电池或其他电子元件。VARIAN VIISTA 80HP能够将多种物质、能量和剂量的离子植入基质中。该装置采用GaAs植入器，利用alpha源和离子束传输系统来保证离子的高加速度。这个过程由主控制软件发起，它允许用户配置植入参数如束种类、能量和剂量。除了植入器，VIISta 80 HP还包括一个用于测量粒子束通量和能量的监视器。能量读数用于确保光束参数针对所需的植入过程进行优化。该装置具有多项安全功能，以确保操作员的安全，包括快门系统、光束准直和联锁。启用后，这些特性有助于最小化杂散离子束辐射，降低暴露风险。如果参数不在预期范围内，它还具有防止光束撞击基板的互锁。VIISTA 80HP是一个可靠和高效的工具，旨在满足半导体行业的需求。灵活的软件允许用户微调植入物参数，以达到高产率，减少他们过程中的污染。安全特性的加入也让操作员安心，他们的过程是安全的，辐射暴露最小化。凭借其先进的功能，VARIAN VIISta 80 HP继续成为半导体光刻行业的标杆工具。
还没有评论