二手 4WAVE IBD 1200-RF #293681881 待售
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ID: 293681881
晶圆大小: 8"
Ion Beam Deposition (IBD) system, 8"
Cassette to cassette
(2) Vacuum cassette elevators
Robot transfer module
Substrate aligner
Single IBD Process module
RF Ion source, 12 cm
Plasma bridge neutralizer
Substrate stage with stage: 200 mm
Spin rotation
2-Target assemblies
Water cooled with angle adjustability, 16"
CTI 400 Cryopump, 16"
Control system automation
Integrated MKS RGA for close loop pressure control
Integrated Quartz crystal rate monitor
Enhanced crystal life option.
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