二手 FEI Helios NanoLab 450S #9363521 待售

Dual beam SEM System Electron source: Schottky thermal field emitter Ion source: Gallium liquid metal, 1000 hours STEM Resolution: 0.8 nm SEM Resolution: Optimal WD 0.8 nm at 15 kV 0.8 nm at 2 kV 0.9 nm at 1 kV 1.5 nm at 200 V with beam decleration Coincident WD 0.8 nm at 15 kV 0.9 nm at 5 kV 1.2 nm at 1 kV Ion beam resolution at coincident point: 4.5 nm at 30 kV 2.5 nm at 30 kV Stages: Flipstage with in-situ STEM Detector Omniprobe sample extractor 5 Axis all piezo motorized 100 mm XY motion Loadlock maximum, 3" Sample types: Wafer pieces Packaged parts TEM Grids Whole wafers, 4" Maximum sample size: 80 mm diameter User interface: Windows GUI with integrated SEM FIB GIS Simultaneous patterning Imaging mode GIS: Carbon Tungsten Platinum Accessories: Chiller – NESLAB ThermoFlex 900 UPS SCS10i Pump Landing voltage: SEM: 50 V - 30 kV FIB: 500 V - 30 kV.