二手 GATAN 697 #9202471 待售
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ID: 9202471
Precision ion polishing system
Ilion II system
Broad beam argon milling system
Whisperlok system: Ability to load / Unload samples
Milling angle: +/- 10 degrees
Milling rate on silicon at 8.0kV: 300um/hr
Low energy focusing penning ion guns
Variable energy: 0.1 to 8.0kV
Ion source:
Ion guns: Two penning with rare earth magnets
Milling angle: +10 to -10°
Ion beam energy: 0.1 - 8.0kV
Ion current density peak: 10(A/cm²)
Beam diameter: Adjustable using gas flow controller / Discharge voltage
Specimen stage:
Mounting: i=Ilion patented blaae
Rotation: 0.5-6.0 RPM
Beam modulation: Single / Double with adjustable range / No modulation
Vacuum:
Dry pumping system: Two stages diaphragm pump backing a 80L/s turbo drag pump
Pressure (torr):
Base: 5 x 10^-6
Operating: 8 x 10^-5
Vacuum gauge: Cold cathode type
Specimen airlock: Whisperlok, specimen exchange time <1 min
User interface:
10" Color touch screen: Simple operation with complete control / Recipe operation
Options:
Certain llion+ II models includes
Llion+ II digital zoom microscope:
Microscope assembly
Digital camera with USB cable / Trigger cable
Imaging PC
Ethernet cable
USB Cable connected to the camera
Power consumption (W):
During operation: 200
Guns off: 100
Argon gas: 25 psi
Power requirements: 100/240 VAC, 50/60 Hz
Manuals included.
GATAN 697是由GATAN公司开发的离子铣削设备。该系统旨在在包括半导体、金属、陶瓷和聚合物在内的多种基板上加工微米级特性。它使用高能离子束以精确、受控的方式将材料从基板上磨掉。697利用高通量离子源、准直单元、光束消烧机、离子提取透镜产生聚焦、高能离子束。然后将离子束引导到基板表面，产生各种过程，如蚀刻、烧蚀、溅射或沉积。离子束可以精确编程，以磨削微尺度特征和结构在基板上。GATAN 697由一个称为GATAN Control的独特软件包控制。此软件允许用户对工具进行编程,以使其以任何所需的角度或模式研磨任何基材。它允许精确控制离子束，从而对复杂的结构和形状进行精确和可重复的加工。697设计有稳健的安全措施。这些特性包括当离子束上升到危险水平时会激活的自动关闭资产，以及由于机械故障而自动关闭。GATAN 697是用于研究和生产应用的基板微米级加工的理想选择。它提供了高精度的，可重复的结果，最小的磨损和撕裂的离子源和组件。该模型是在各种基板上产生微米尺度特征的可靠、经济的方法。
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