二手 ESI 9830 #9190610 待售

Laser repair systems System mainframe: Self contained environment Temperature control Vibration isolation Field configurable for international power ESD Resistant up to an 8KV discharge X-Y Stage: < 0.18 um |m| +3s accuracy over 35mm x 35mm field Continuous and real-time accuracy calibration Air bearing X-Y stage Wide field of travel accommodates up to 300mm wafers On the fly link blow capability Vacuum wafer hold-down for 200mm or 300mm wafers Laser subsystem: Q-switched diode pumped vanadate laser 1.34 Microns (Infrared) wavelength Air cooled Fully programmable spot size range Wafer handler subsystem: Dual-yaw 3-Link Fixed position robot with integral prealigner Interchangeable load ports Deionizer ESI Vision subsystem: Automatic wafer alignment using pattern recognition Automatic recovery routines Realtime optimization of operating parameters ESI Scribe read / Scribe view Front side alpha numeric / Bar code character recognition System control computer subsystem: Pentium VME single board computer: Main memory: 1GB High performance cache memory: 512KB 30GB SCSI HDD DAT Tape 20GB Uncompressed / 40GB Compressed DVD / CD Rom drive Floppy disk drive, 3.5" Arm-mounted 21" flat panel Touchscreen color monitor Industry standard ethernet interface connector Operating system: Linux Y2K Compatible SEMI Compliant graphical user interface TCP-IP FTP, NFS System control software: Event logging capability Variable MDA (Multiple die alignment) capability Process monitoring capability Robust wafer alignment capability Graphical user interface Pattern series generator Algorithm verification tools Documentation: Standard system documentation Service / Hardware support guide Applications / Software support guide On CD-Rom in PDF format System mainframe configuration: Maximum laser energy: 2uJ Kit, 9830 destination, english 16.5±2ns @ 50kHz (LPW) Pulse picked f0.55 Objective lens (Spot Size (1/e2): 1.6um - 3.8um) System options: Link inspection station Backside WID kit Exhaust duct option Battery backup (UPS) 5-Light LED beacon assy Seismic restraint brackets Includes: Advantag TAG read Wafer mapper Load port: First load port: SEMI E15.1 load ports for 300mm foup Second load port: 200mm and 300mm open cassettes Load port options: E84 Sensor DMS-HB1 Currently warehoused.