二手 KINGSEMI KS-S200-2ST #293767544 待售

Glue remover, 8" Material: Silicon Thickness: 0.5-1 mm FFU: 0.3 µm (2) Box station units: Cassette type: SMIF Film transmission unit: RORZE Robot (4) Robot axis: Z-Axis, T-Axis, R1-Axis and R2-Axis Minimum turning radius: 335 mm Accuracy: ±0.1 mm Degumming unit: Centrifuge maximum speed: 2000 RPM Minimum adjustment: 1 RPM Speed accuracy: ±1 RPM Arm 1: Servo motor swing arm High pressure nozzle Degumming liquid pressure: 65° Fan nozzle 2~8 Mpa Arm 2: Servo motor swing arm Normal pressure cylindrical nozzle Degumming liquid flow rate: 0~1500 ml/min Immersion unit: Stainless steel 316L Chamber PPS 15-Cassette slots Process liquid supply and distribution system: (2) N2 Tanks Buffer tank Factory system: (3) CDA (Clean Dry Air): Pressure: 0.5 Mpa Flow: 100 L/min Connection method: 3/8 Compression fitting (4) N2 (Process nitrogen): Pressure: 0.5 Mpa Flow: 100 L/min Connection method: 3/8 Compression fitting CO2: Pressure: 0.1-0.3 Mpa Flow: 30 L/min Connection method: 3/8 Compression fitting (2) UPW: Pressure: 0.4 Mpa Flow: 8 L/min Connection method: 3/8 Compression fitting VAC (Vacuum system): Pressure: 80 KPa Flow: 30 L/min Connection method: 3/8 Compression fitting (3) Exhaust: Pressure: 350-450 Pa Flow: 30 L/min Connection method: Tube, 100 mm (3) Drains (Waste liquid discharge): Connection method: 3/4 Ferrule fitting Industrial PC Touch screen, 15" Operating system: Windows Power supply: 380 VAC, 3-Phase, 5-Wire.