二手 EVG / EV GROUP IQ Aligner #293735310 待售
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ID: 293735310
晶圆大小: 6"-8"
优质的: 2007
Mask aligner, 6"-8"
Maximum separation: 300 µm
Thickness:
Mask aligner: 0.1 - 10 mm
Bond aligner: 0.1 - 3 mm
Alignment:
X,Y Range +/- 5 mm
Rotation: Theta +/- 3.5°
3-Axis joystick
Resolution: 0.06 µm
Mask aligner: 0.5 µm
Bond aligner: 0.5 µm
Exposure modes:
Hard contact
Soft contact
Vacuum contact
Vacuum + Hard contact
Proximity
Microscope objective range:
Top side:
X: 30 - 130 mm
Y: +/- 65 mm - 150 mm
Z: +/- 3 mm
Bottom side:
X: 30 - 100 mm
Y: +/- 12 mm
Z: +/- 5 mm
Monitor / Camera:
Power supply: 350 -500 W
2007 vintage.
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