二手 EVG / EV GROUP IQ #293705990 待售
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ID: 293705990
晶圆大小: 6"-8"
优质的: 2008
Mask aligner, 6"-8"
Top Side Alignment (TSA)
Back Side Alignment (BSA)
CCD Camera
Motors encoders limit switches sensors pneumatic
Automatic alignment for top and / or bottom side
Reinforced stage drives: X/Y/Theta axis
Automatic wedge compensation
Substrate and mask
Objectives lens: 5x, 10x
SP6400169 Shutter unit
Hg lamp: 500 W / 1000 W
Fully motorized split field microscope for bottom side view with CCD camera
Motorized swivel arm wafer loading trays for wafer size IC devices
PC
2008 vintage.
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