二手 KLA / TENCOR 2367 #9197191 待售

Inspection system, 12" Wafer calibration kit include DSW / Shiny Carrier ID HW Options KEYENCE BCR single wire (2 CID devices) Safety interlocks: Open panel Lamp Facilities: Power: 208V, 3 phase Vw: 25 in Hg CDA: 5 Sft/min Exhaust: 600 ft3/min Exhaust: 100 ft3/min Exhaust: 1300 ft3/min Integrated mini environment included FEC Computer system with the following minimum features: Intel pentium 4 CPU 3.00GHz 504MB memory (RAM) Dell computer Intel xeon CPU 3.4GHz 2GB Memory (RAM) DVD-ROM Mouse Keyboard IDM InlineADC ITF Load port UI MDAT Mixed mode NFS Data transfer HSMS / GEM Semi E37 compliant ethernet interface: HSMS (E5 / E30 / E37) GEM/SECS Automation interface (E4 / E5 / E30) SEMI E84 SEMI E116 Hokuyo sensors for use with: Overhead transport (OHT) Remote guided vehicles (RGV/AGV) Auto switch for dual use environments Basic automation package: E39, E87, E90 (Carrier management/wafer tracking) Advanced automation package E40. E94 (Process job, control job) Spatial population analysis: Power options Array segmentation Patch images: 64x64 Pixel perfect RBB RBMT Sensitivity tuner NPA Photo option: FEM PWQ Interface: Data transfer DVD-R Ethernet 23XX Options : Pixel size: Visible: 0.25/0.39/0.62 IV Broadband & narrowband: 0.12/0.16/0.20 Full sky: 0.12/0.16/0.20 Edge contrast: 0.12/0.16/0.20 Hardware optic : BB Visible pixels (0.62 mm, 0.39 mm, and 0.25 mm) BB/I-Line/G-Line UV pixels (0.20 mm, 0.16 mm, and 0.12 mm) Edge contrast 1600 MP PS Image computer Array / Random modes High mag review optics Anti-blooming TDI High resolution review camera General system info: Loading configuration: FOUP (2) Cassette (2) FOUP Positions System on-line: Yes Line conditioner: Yes Cables: Yes Fan module: Yes Shipping brackets installed upon deinstall: Yes GEM/SECS Interface: Yes Hard disk: 876G Currently stored in cleanroom 2007 vintage.