二手 KLA / TENCOR 2835 #293757955 待售
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ID: 293757955
晶圆大小: 12"
优质的: 2012
Wafer inspection system, 12"
(2) SMIF
Loadlock
Chamber
Electron source and column assembly
Handler system: KLA integrated frontend Phoenix 2
Fab section: Defect detection
Process: Brightfield inspection
(4) IMC racks
(4) Lasers
(4) Chillers
Missing parts:
Stage controller
Stage interferometer
PS
2012 vintage.
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