二手 KLA / TENCOR STARlight SL3 UV URSA #9058370 待售

Inspection system, 6" Automation: KLA RF File format output Klarity analysis Automatic error recovery System output: Minimum output capability (Reticles per week): 0.25 um pixel size with 100 x 100 mm inspection area: 100 Minimum run rate (Reticles / Hour): 0.25 um pixel size for 100 x 100 mm inspection area: 0.7 0.375 um pixel size for 100 x 100 mm inspection area: 1.3 0.5 um pixel size for 100 x 100 mm inspection area: 1.9 Process capability: Box handling Manual load NIKON Reticle, 6" Upgraded to HR (High resolution) Mask basic inspection capability: OPC Inspection APSM (DAP Design) Inspection EPSM Inspection capability including EPSM and full ternary Shifter transmission: ≤40% at 364 nm wavelength Review capability: Transmission review Reflective review On line review Repeat review Sizing capability Offline view (Not classification) Offline classification option Show new defect capability Recipe setup / Automation: Auto setup capability Light tower Selectively inspect: Glass, pellicle or chrome surfaces Maximum recipe setup time: 15 Minutes Three level password protection capability: Operator, engineer & FSE Continuous vs single-step operation capability Auto loader cycling capability Barcode reading capability Networking capability Auto operation capability with existing recipe Minimum inspectable mask characteristics: Minimum pitch larger than or equals to twice of the minimum line width: Minimum inspectable main feature size (nm) at: 0.186 um pixel size (Option): 400 0.25 um pixel size: 500 0.375 um pixel size: 750 0.5 um pixel size: 1000 Minimum pitch larger than or equals to 2.5 times of the minimum chrome line width: Minimum inspectable main feature size (nm) at: 0.186 um pixel size (Option): 220 0.25 um pixel size: 320 0.375 um pixel size: 560 OPC Features: Minimum inspectable OPC serif / Inverse (nm): 200 Minimum inspectable OPC jog (nm): 14 Inspection characteristics: Within tool matching: ≤5% Tool to tool matching: ≤10% False defect rate (Defects/cm²): 0.1 For inspection area > 10 cm²: 0.1 Sensitivity on pellicle @ 98% capture rate (nm): 4000 Sensitivity on glass @ 98% capture rate (nm):4000 Minimum pitch larger than/or equals to twice of the minimum line width: Sensitivity on chrome @ 98% capture rate (nm) at 0.186um inspection pixel size PSLs (Option) EPSM capture rate on shifter substrate @ 90.4%: 140 Sensitivity on chrome @ 98% capture rate (nm) at 0.25um EPSM Capture rate on shifter substrate @ 90.4%: 180 Sensitivity on chrome @ 98% capture rate (nm) at 0.375um Sensitivity on chrome @ 98% capture rate (nm) at 0.50um Minimum pitch larger than or equals to 2.5 times of the minimum chrome line width: Sensitivity on chrome @ 98% capture rate (nm) at 0.186um Sensitivity on chrome @ 98% capture rate (nm) at 0.25um Sensitivity on chrome @ 98% capture rate (nm) at 0.375 um Inspection pixel size on reticle using PSLs: 350 Sensitivity on chrome @ 98% capture rate (nm) at 0.5 um Inspection pixel size on a reticle using PSLs: 500 Exclusion zones: Pelliclized plate: Exclusion on chrome side (mm) For 0.25um pixel or greater: 3.5 For 0.186um pixel: 5.5 Exclusion on pellicle (mm): 1 Exclusion on glass (mm): 3 Unpelliclized plate: (3) Exclusion on 6" back glass (3) Exclusion on 6" front side 1999 vintage.