二手 KLA / TENCOR Surfscan SP2 XP #9221536 待售
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ID: 9221536
晶圆大小: 12"
优质的: 2006
Particle measurement system, 12"
Sensitivity modes:
Standard throughput inspection mode
High throughput inspection mode
High sensitivity inspection mode
Advanced illumination optics supporting the following mode(s):
Normal illumination
Oblique illumination
Includes:
UV Laser
Defect map and histogram with zoom
iMicroView measurement capability
SURFimage
Real-time defect classification (RTDC)
Microsoft Windows XP operating system
Book on board
Soft copy of operations manuals
Puck handling: 8"/12"
Equipped with powder coat painted panels
12" Phoenix dual FIMS vacuum wafer handler (PP) included
Secondary UI for bulkhead installation
Configured for MCCB (US/EU) power inlet
Configured for IC/OEM Mfg surf quality recipe
STD Throughput inspection mode
High throughput inspect mode
Optical filter
Enhanced XY coordinates enabled:
Standard classification
LPD-N classification
LPD-ES classification
Grading and sorting
20°
40°
Rough films
Haze enabled
Haze normalization enabled
Haze analysis enabled
Haze line classification enabled
IDM SP2
2mm Edge exclusion
4 Color light tower (RYGB)
GEM / SECS & HSMS
T System (High speed messaging system)
E87 Carrier management services (Based on E39)
Based on E39 object services
E40 Process job management
E94 Control job management
E90 Substrate
Tracking
(2) AdvanTag radio frequency (RF) carrier ID readers
Identifies the name of the carrier (FOUP)
Intended for use with phoenix handler and Isoport load ports
One reader required for each FOUP load port
2006 vintage.
KLA/TENCOR Surfscan SP2 XP是一种先进的晶圆检测设备，设计用于高精度、高精度的掩模检测和晶圆表面表征。它结合了自适应光学、低噪声成像、自动化测量算法和强大的计算能力，为晶圆表征和缺陷分析提供了一个全面的平台。KLA Surfscan SP2 XP具有高达12mm的大视场（FOV）和优于1µm的高光学分辨率，使其能够精确测量甚至亚微米的缺陷。它有能力每分钟分析多达150个晶圆图像，其自动测量结合了严密的点检测、区域扫描和数据驱动的滤波和像素分析。它内置的图像融合技术使系统能够准确比较来自多个传感器的数据，确保了最高精度。该单元配备了改进的成像软件、先进的图像分析库和强大的硬件设计，使其能够有效检测晶圆表面的污染、缺陷和变化。它还包括一个光源，可以调整以在红外线、可见光谱或紫外线光谱（UV）中运行，使其能够检查高反射率的表面以及嵌入的特征。机器的多级缺陷检测和分析功能使它不仅能够检测颗粒污染物，而且能够评估其组成、大小、形状和方向。此外,TENCOR Surfscan SP2 XP还提供了一种自动内联处理和报告工具,可提供实时晶圆缺陷信息。数据分析和报告工具可帮助用户快速识别故障趋势并采取主动措施以提高产量。Surfscan SP2 XP具有先进的成像、高分辨率测量和坚固的硬件设计,是掩码检查和晶圆表面表征的理想平台。它非常适合半导体生产、包装和平板显示行业，为高通量、高精度晶片和掩模检测提供了完整的解决方桉。
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