二手 KLA / TENCOR Surfscan SP2 #9314791 待售
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ID: 9314791
晶圆大小: 12"
Inspection system, 12"
Scan module
Blower
Processor: 2.2 GHz
Operating system: Windows XP
Oblique incident
Edge cut: 2 mm
STD Throughput
Enhanced XY Co-ordinate
Defect classification: Slipline, Scratch and LPD-N
Haze normalization
Haze analysis
Optical filter
Space filter: 20°
Space filter: 40°
Space filter rough film
Options:
Part number / Description
0088725-000 / Normal incident
0088727-000 / High sensitivity mode
0088727800 / High throughput mode
0088732-000 / GEM/SECS
0088733-000 / HSMS
0088731-000 / NFS Client
0088737-000 / E84 Automation support, 12"
0088738-000 / E87 Automation support, 12"
0088739-000 / E40/E94/E90 Automation support, 12"
0088748-000 / LPD-E/S Classification
0088749-000 / Grading / Sorting
0088740-000 / Printer
J00012 / Printer rack
- / BSIM
- / Pato-light
Wafer thickness:
0.725 mm, 8"
0.775 mm, 12"
Sensitivity:
High sensitivity:
Oblique:
Wide: 37 nm
Narrow: 60 nm
Normal:
Wide: 61 nm
Narrow: 78 nm
STD Sensitivity:
Oblique:
Wide: 42 nm
Narrow: 70 nm
Normal:
Wide: 68 nm
Narrow: 83 nm
High throughput:
Oblique:
Wide: 47 nm
Narrow: 80 nm
Normal:
Wide: 72 nm
Narrow: 93 nm
Throughput:
High sensitivity mode:
Edge handling dual FIMS: 15 WPH
Vacuum chuck dual FIMS/Open: 24 WPH
Vacuum chuck 8": 40 WPH
Edge handling 4 x 8": 32 WPH
STD Mode:
Edge handling Dual FIMS: 30 WPH
Vacuum chuck Dual FIMS/Open: 49 WPH
Vacuum chuck, 8": 68 WPH
Edge handling 4 x 8": 55 WPH
High throughput mode:
Edge handling dual FIMS: 58 WPH
Vacuum chuck dual FIMS/Open: 75 WPH
Vacuum chuck, 8": 90 WPH
Edge handling 4 x 8": 80 WPH
Lighting smooth
DPSS Laser : 350 mW, 355 nm
Vacuum:
Scan module
Pressure: -24 ~ -30 Hg
Flow: 1 SCFM
FOUP Opener (Dual FIMS):
Pressure: -24 to -24 Hg
Flow: 1 SCFM
Compressed air:
Scan module
Pressure: 85-105 psi
Flow: 4 SCFM
Condensation: -29°
Edge end effecter:
Pressure: 90~120 psi
Wafer handling:
Edge handling
Vacuum chuck
Data output:
High resolution TFT color flat panel display
USB
Parallel port
Serial port
DVD+RW Drive
Floppy Disk Drive (FDD), 3.5"
Network connector: 10/100 Base-T
ISDN Connector
Voltage: AC 200 V±10%
Frequency: 50-60 Hz ± 5%
Power supply: 200 V, Single phase, 2.88 kVA.
KLA/TENCOR Surfscan SP2是一种高度先进的掩模和晶圆检测设备，用于确保半导体芯片生产的质量和一致性。该系统使用明亮的激光照明源和高分辨率图像检测单元，以以前系统中看不见的分辨率级别捕获晶圆、蒙版和标线上特征的图像。KLA Surfscan SP2测量最复杂的标线上0.5微米的公差，以确保最高的精度和精确度，并且可以检查超出常规光学检查系统的特征尺寸。该机使用专利的"激光加快门"技术，在所需的视场范围内获取掩模或晶圆上最小特征的清晰图像，其动态镜头工具允许用户将分辨率放大至x 128。此外，资产先进的高灵敏度图像处理技术能够获得高精度的各种场大小的图像，高达55分贝。TENCOR SURFSCAN SP 2的设计考虑到了简单的操作,它具有用户友好的界面和直观的图形控制,允许简单的设置和操作。它配备了用于快速准确的缺陷隔离的反馈（FB）算法,以及针对传统的"直印"和"划痕"等困难缺陷的专利缺陷隔离技术。为方便用户，该模型捆绑了一套软件工具，能够生成各种文件格式的扫描数据报告，包括txt、csv和html文件。KLA SURFSCAN SP 2是一款紧凑、完全自动化的设备,可现场升级,并且需要最少的服务支持,因此是满足关键掩蔽和晶圆检查需求的理想检查选择。它专为质量关键型大批量生产环境而设计,其软件和硬件的高效组合提供了最高水平的准确性、可靠性和速度。
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