二手 TAYLOR HOBSON TalySurf #9153363 待售
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ID: 9153363
晶圆大小: 8"
优质的: 2014
Automated surface and contour inspection system, 8"
System hardware
Anti-vibration support frame
TalySurf granite base and column
TalySurf traverse unit
PGI gauge
System control & analysis
Electronic control unit (ECU)
ECU (S21) control software
Ultra control & analysis software
Licensed dual profile analysis software (Ultra)
Licensee roughness (VDA 2005) analysis software (Ultra)
Licensed waviness analysis software (Ultra)
Licensed parameter tolerancing software (Ultra)
Licensed aspherics analysis software (Ultra)
Licensed conic section analysis software (Ultra)
Licensed form measurement software (Ultra)
Required options
Gauge range
Range = 12.5mm (PGI1200)
Gauge resolution
Gauge resolution 0.2nm
Stylus lilt options
Standard gauge control with motorized lift lower
Traverse length
200mm traverse
Column height and tilt
450mm column with non-tilting traverse
Instrument platform
Pneumatic AV platform including desk for pc
Computer & monitor
High grade pc (processor, memory, hard drive, cd / dvd)
Intel Pentium processor (2.0 GHz. 1mb l2 cache, 800 MHz FSB)
2GB ram
160 GB hard drive (SATA 3 Gb/s), 16x dvd r/w
Monitor
19" LCD (hi res)
Styli
60mm arm with 2um radius & 60dog cone
120mm arm with 0.3mm diameter (ruby)
60mm arm with 2um radius & 90deg cone
60mm arm with 5um radius and 90deg cone (recess)
60mm stylus arm with 2um rad *10deg conisphere diamond tip
60mm stylus arm with 0.8mm diameter ball silicon nitride tip
120mm arm with 0.8mm diameter (silicon nitride)
Calibration standards
Calibration standard (80mm radius)
Staging
Air bearing rotary stage
Mains power
220vac (+/-10%)
Mains lead
Mains lead (UK)
Datum correction
Datum correction pack
Part number Description
M112-4117-02 Form talysurf PGI optics Std
112-3145-06 S21 PGI 12mm Gauge
112-3984-01 02nM PGI Software licence
112-3821-01 PGI Iift /lower
112-3123-02 S21 200rnm Traverse unit
112-3849-01 S21 450mm Fixed col granite
112-4177-01 PGI Pneu AV Base+Desk+Surround
112-4241-01 L2 Enhanced aspherics anaylsis
112-4344 02 HP DPU - All Languages
112-4120-01 Hewlett packard 19" disply
112-3227-02 60mm 60J 2uM Recess PGI stylus
112-3221-02 60mm 90J 2uM Recess PGI stylus
112-3224-01 60mm 5uM Radius 90 deg
112-3412-02 60mm 40 2uM Recess PGI stylus
112-3411-01 60mm 0.8mrn Diameter ball
112-3404-01 120mm 0.3mm Diameter ball
112-2028-01UC Cal Std 80mm Rad & UKAS Cert 220V 220VAC (+/-10%)
LANG-ENG English
112-2367 FEC 119-6440 Mains lead (UK)
112-4147-01 Datum correction pack
SPECIALDP RT150/200-A2 Precitech rotary
SS TRAIN THLE Training at TH Leics
SS INST THUK Install by TH UK engineer
112-3405-01 120mm 0.8mm Diameter ball
2014 vintage.
Taylor-Hobson TAYLOR HOBSON TalySurf是一种基于3D光学轮廓测量的先进光学计量设备。该系统非常适合用于掩模和晶片级特性的无损检测，以确保半导体制造业的表面质量和平整度。该设备基于获得专利的Talyprofiler 3 D扫描仪,具有行业标准的RMDx光学轮廓测量模块,能够在1秒内提供准确的结果。TalySurf经过专门设计，以满足生产半导体晶片和掩模的制造商的需求，以满足严格的行业质量标准。它甚至可以检测到晶片和掩模上最小的特征和缺陷,每次通过的数据高达25微米,使其成为一台极其精确可靠的机器。TAYLOR HOBSON TalySurf提供了全方位的功能,例如具有点击测量工具的用户友好软件,以及用于表面轮廓测量、涂层厚度测量和高级图像分析的高级软件。该工具旨在在水平平面和垂直平面上捕获高分辨率的表面图像,可以将其转换为图形,以便与行业标准进行比较。它也可用于测量特征长度、深度和直径，以及纳米级的高精度表面剖面图。TalySurf具有内置的集成视觉传感器,它使用高级算法和预定义的测量模板的组合来准确确定目标曲面的3D属性。TAYLOR HOBSON TalySurf非常容易设置和用于掩模和晶圆检查,并且只需要基本的操作员培训就能充分利用它。它具有多种可定制的选项,包括各种照明角度、焦点设置和特定材料的扫描速度。该资产还具有允许快速、安全地传输数据以及远程控制设备的软件。总体而言，Taylor-Hobson TalySurf是一种非常可靠且经济高效的用于掩模和晶圆检查应用的设备。其精确的测量和先进的软件使其成为任何需要准确可靠检验结果的公司的理想选择。其用户友好的设计和直观的设置使其易于使用，即使对于没有经验的操作员也是如此，而且它有广泛的可自定义设置选择，以适应各种材料和工艺要求。
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