二手 ZEISS / ACCRETECH / TSK RONCOM 55A #9118660 待售
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ID: 9118660
优质的: 2002
Form tester
Measuring range:
Max. measuring diameter: 350mm
Left/right feed (R-axis): 191mm
Up/down feed (Z-axis): 350mm
Max. load diameter: 600mm
Max. measuring height: outer diameter 350mm (675mm for roundness/coaxiality measurement), inner diameter 350mm
Rotation accuracy:
JIS B7451: (0.02 + 6H/10000)um H: height from table surface to measuring point (mm)
Max. deviation from min. square circle: (0.01 + 3H/10000)um
Straightness accuracy:
Up/down direction (Z-axis): 0.15um/100mm, 0.3um/350mm
Radius direction (R-axis): 1um/100mm
Parallelness accuracy:
Up/down direction (Z-axis): 1.5um/350mm
Rotation speed:
Measurement: 2-10/min
Alignment: 6, 10 or 20/min
Up/down speed (Z-axis):
Measuring speed: 0.6-6.0mm
Movement speed: 0.6-30.0mm
Radius speed (R-axis)
Measuring speed: 0.6-6.0mm
Movement speed: 0.6-15mm
Auto stop:
Function: Z-axis, R-axis
Stop accuracy: Z-axis +/-5um, R-axis +/-5um
Table load conditions:
Table outer diameter: 290mm
Centering adjustment range: +/-5mm (automatic)
Tiling adjustment range: +/-1° (automatic)
Detector:
Measuring force: 30-100mN
Stylus shape: 1.6mm carbide ball
Roundness evaluation of profile error:
MZC (min. range center line method), LSC (min. square center line method), MIC (max. inscribed circle center line method)
MCC (min. circumscribed circle center line), N.C. (no correction)
Measuring items:
Rotation direction: roundness, flatness, parallelness, concentricity, coaxiality, cylindricity, diameter deviation, non-uniformity, squareness, run-out
Rectilinear direction (Z): straightness, taper, cylindricity, squareness, paralleness
Radius direction (R): straightness
Functions: CN measuring function, notch function (level, angle, cursor), parameter design value collation
Types of filters: digital (2RC, Gaussian)
Cut-off value:
Rotation direction: 15, 50, 150, 500, 15-150, 15-500 peaks/rotation
Rectilinear direction (Z): 0.025, 0.08, 0.25, 0.8, 2.5 or 8mm
Display:
Monitor: 15" Color
Content: measuring conditions, measuring parameters, profile drawing (expansion plan, 3D plan, shading), printer output conditions, comments, error message, etc.
Recording unit:
Method: select color printer or laser printer
Magnification: 10-200K (22 steps), auto, measuring magnification
Power source: AC 100V, 50/60Hz
Power consumption: 800VA (not including printer)
Air source: 0.5 - 0.7MPa
Air consumption: 30 l/min
(1) Reference sphere
(1) Reference cylinder
(2) Reference gauge blocks
Computer & monitor
Currently installed in cleanroom
2002 vintage.
ZEISS/ACCRETECH/TSK RONCOM 55A是为半导体工业设计的最先进的掩模和晶圆检测设备。该系统提供出色的图像分辨率、高灵敏度和自动缺陷审查单元(ADRS)。基本机器由电动x/y级、自动晶圆处理器、显微镜头和光源组成。该工具可同时进行1 x和10 x检查。显微镜头具有10倍的无穷大校正光学资产,在亮场和暗场照明中均具有平坦的视野,具有优异的成像性能。光源高度稳定,具有40 klux输出能力。与电动滤波器轮一起,这允许应用特定的缺陷检查,如划痕,颗粒,电荷陷阱,模式故障等等。该模型还提供了自动缺陷检查设备(ADRS),这是一种先进的基于AI的机器学习算法,能够以优异的可靠性进行自动缺陷检查。系统的结果可以导出到不同的格式进行报告和进一步分析。TSK RONCOM 55A具有用于晶圆处理、检查、审查和分析的全面软件功能。其用户界面直观易用,非常适合半导体行业各种缺陷检测应用。该装置的核心是最先进的电动x/y级,在样品装卸和检查期间提供精确、可重复的运动。结合自动化晶片处理程序,这允许一口气检查多个晶片,同时在检查多个晶片之间保持突出的准确性和可重复性。总体而言,蔡司RONCOM 55A是一种先进的机器,设计用于半导体行业的掩模和晶圆检查。它提供高图像分辨率、可靠的自动化缺陷检测和易于使用的软件,使其成为精确高效的缺陷检测的绝佳选择。
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