二手 VEECO Gen II #9073487 待售

製造商
VEECO
模型
Gen II
ID: 9073487
晶圆大小: 3"
MBE Growth system, 3" (10) ports for dopants Process: Growth of arsenides and phosphides Liquid nitrogen Phase separator AlGaAs Laser Room temperature: 6°C - 10°C Vacuum: Growth chamber (GC) Triode ion pump: 400 l/sec Buffer chamber (BC) Triode ion pump: 200 l/sec (2) TSP Controllers Loadlock chamber (LC) (100) CTI Cryotor cryopumps (2) Vacshorption pumps Ventury pump In situ and calibration tools: RHEED System: 0-10 keV RHEED Oscillation growth rate calibration system Cells: EPI Valved cracker with valved controller Cable Riber three zone P Valved cracker with valve controller Power supply (4) 400g Sumo cells Ga, In, Al (2) Dopont cells Dual electronic equipment rack, 19" (12) Solenson DC power supplies Riber P valved cracker 2704 Dual channel Eurotherm controller Substrate and heated station (2) DC Power supplies Substrate heater Heated station Other tools: Ircon optical pyrometer Growth chamber and beam flux (2) GP Ion gauge controllers Buffer and loadlock chamber RHEED Power supply RGA Power supply unit TEK Scope Riber P cracker power supply Pyrometer port heated viewport Substrate manipulator controller Loadlock chamber Lamp power and controller AGILENT / HP / HEWLETT-PACKARD / KEYSIGHT Chart record mounted RHEED Oscillation recording Trolley for substrate handling.
VARIAN/VEECO GEN II是一种分子束外延(MBE)设备,用于生产薄膜和材料层,用于广泛的应用。该系统由几个组件组成,包括主室、生长室、积液室、泵和计算机控制的监视器。主室容纳积液池,其中包含要蒸发的物质的来源。主室是真空密封的,薄膜生长发生在生长室内。积液池可加热至高达1000 °C的温度,使材料蒸发。室壁加热以确保整个MBE生长室的温度均匀。VEECO GEN II能够生产厚度在3-200 nm范围内的薄膜和层。该机组装有三个积液电池,所有电池都连接到涡轮分子涡轮分子泵上。这使机器在主室内达到1.0x10-10 Torr的压力,非常适合薄膜生长。电池还可以安装一个外部挡板,以减少膜沉积过程中中性物质的通量。该工具除了具有生产薄膜和层的能力外,还包括计算机控制的显示器。该监视器用于控制室内温度和压力,并监测生长过程。该资产还包括各种安全特性,如真空密封和用于监测腔室温度的热电偶。VARIAN GEN II是为广泛应用生产薄膜和层的理想模型。该设备包括大型薄膜生长所需的功能,而系统的计算机控制监视器允许精确控制薄膜生长过程。该单元还设计为模块化,允许用户根据需要扩大或减少积液细胞的数量。凭借强大的设计和先进的功能,GEN II是薄膜研究者和开发者的绝佳选择。
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