二手 ACCUTHERM AW 810 #9185465 待售
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ID: 9185465
晶圆大小: 2"-8"
Rapid thermal processing system, 2"-8"
Ramp up rate: 10°C to 120°C per/sec
Maximum rate: 200°C
Steady state duration: 0-300 sec/step
Steady state temperature range: 150°C - 1150°C
Maximum: 1250°C
ERP Pyrometer:
450-1250°C
With ±1°C accuracy
Thermocouple:
100-800°C
With ±0.5°C accuracy
Temperature:
Repeatability: ±0.5°C
Uniformity: ±8°C across an 8"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Main frame with wires
Pentium® class computer with LCD monitor, 17"
Mouse and standard keyboard
Aluminum oven chamber
With water cooling passages
Gold plating plates
Door plate with TC connection port
Oven control board
Main control board
Bottom and top heating with 27 (1.2kW) radiation heating lamp module
Isolated quartz tube:
Without pyrometer window
With pyrometer window
(4) Bank zones
Top: Front and rear
Bottom: Front and rear
Quartz tray: 5" to 8" Round wafer / Customized
Gas line with gas MFC with shut-off valve
T-Shape quartz with qualified K-type TC
Holder: 100°C-800°C temperature measurement
Thermocouple wires: (5)pcs
Option:
MFCs with gas control
Carrier / Susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Patented ERP pyrometer (400-1250°C)
Non-contact high temperature sensor
Chiller for ERP pyrometer
Single point for pyrometer calibration
Omega meter for pyrometer and thermocouple calibration
Shutt-off valve for quartz tube
Lamps cooling control
Spare parts
Type:
Atmospheric RTP RTA
Desktop
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(27) Lamps
(4) Lamp zones
Isolated quartz tube
Gold plating plates:
Top
Bottom
Front
Rear
Left
Right
Water cooled oven chamber
Substrate size, 8"
Substrate thickness: <10 mm
Substrate material:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800°C-1250°C
Temperature sensor: TC
Longest steady time @1000 °C: 10mins
Vacuum pressure control: No
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating / Customized
Option:
Temperature sensor: ERP
Omega meter: CL23A
Susceptor: Base and cover
Power:
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 100
CE Marked.
ACCUTHERM AW 810是为各种工业应用而设计的工业级烤箱/炉。这座炉子的发电站采用坚固耐用的钢和不锈钢建造的顶端结构，使其能够轻松地进行苛刻的温度应用。强大的燃烧器技术、双级燃气加热设备和高速气流为包括金属加工和锻造在内的各类工业应用提供一致、准确的温度。AW 810的散热设计在动力和性能上无与伦比。该炉为每个燃烧室配备重型燃烧室，采用先进的模块化设计，以减少停机时间。燃烧器燃烧器由使用天然或液化石油气的优质燃烧器提供动力。双级燃气系统在炉内提供高效准确的温度控制，不断推动火焰，确保精确加热。ACCUTHERM AW 810的内室设计为充分利用其高速、低压气流单元。这是通过使用低矮的孔径密封来实现的，这有助于保持整个腔室的均匀温度。风扇驱动的对流机确保当室内温度达到极端水平时，传热保持一致。AW 810的内部覆盖着一个保护性的S型热工挡板。这种专门的挡板通过屏蔽墙壁免受高温影响来提高腔室的热效率，确保腔室在最佳持续时间内保持其温度。耐热绝缘有助于减少热量损失，最大限度地提高能源效率。ACCUTHERM AW 810还配备了防护安全工具。资产包括一个集成的高温安全开关，在过热时切断腔室和风扇的电源。此外，该炉设计有温度限制控制，当温度达到不安全水平时停止运行。对于后处理和加热应用，AW 810是理想的选择。这款功能强大的烤箱/炉采用重型钢结构、双壁腔室和精确温度控制,是需要一致、可重复、可靠的加热和冷却过程的工业应用的理想解决方桉。ACCUTHERM AW 810具有耐用的结构和节能性能,是满足您所有工业应用需求的理想选择。
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