二手 ACCUTHERM AW 810V #9185474 待售
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ID: 9185474
晶圆大小: 2"-8"
Rapid thermal processing system, 2"-8"
Vacuum pressure: 50m Torr to 13 Torr / 13 Torr to 760 Torr
Ramp up rate: 10°C to 120°C per/sec
Maximum rate: 200°C
Steady state duration: 0-600 sec/step
Steady state temperature range: 150°C - 1150°C
Maximum: 1250°C
K-Type TC temperature accuracy: ±1°C
Thermocouple temperature accuracy: ±0.5°C
Temperature:
Repeatability: ±0.5°C
Uniformity: ±8°C across a 8"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Main frame with wires
Pentium® class computer with LCD monitor, 17"
Mouse and standard keyboard
Aluminum oven chamber
Water cooling passages
Door plate with TC connection port
Top and bottom quartz windows
Heating module with 28 (1.2kW) radiation lamps
(6) Bank zones control
Oven control board
Main control board
Quartz tray: 2-4" / 4-6" / 5-8" Round wafer
(2) Gas lines with gas MFC with shut-off valve
Main vacuum valve
Options:
Atmospheric process function
Vacuum pressure measurement and control function
Vacuum pump:
Mechanical
Dry
Multiple process gases
MFCs (Up to 4) with gas control board
K-Type TC assembly for high temperature
Carrier / Susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Omega meter thermocouple calibration
Shutt-off valve: Quartz tube
Lamps cooling control
Spare parts
Types:
Vacuum RTP RTA
Desktop
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(27) Lamps
(4) Lamp zones
Isolated quartz tube: No
Gold plating plates:
Top and bottom in lamp module only
Water cooled oven chamber
Substrate size, 8"
Substrate thickness: <10 mm
Substrate materials:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800-1250/1500°C
Temperature sensor: TC, Special TC
Longest steady time @1000°C: 10mins
Vacuum pressure control:
50m Torr-13 Torr (Option) / 10-6 Torr
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating
Susceptor size: 4, 5, 6, 8, 4X4”, 5X3”, 16X2”
Base pressure: 50m Tor / 10-6 Torr
Options:
Omega meter: CL23A
Process gas lines with MFCs: 2, 3
Atmospheric function
Susceptor: Base and cover
Power :
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 100
CE Marked.
ACCUTHERM AW 810V炉是一种功能强大的高温炉/炉,旨在满足一系列先进工业工艺和应用的需要。AW 810V是一种强制对流烤箱，利用空气循环方法来确保整个工作室内的温度一致，均匀。这样可以快速加热大批次或大批次，使中小型批次得到高效、准确的处理。ACCUTHERM AW 810V配备双壳低热质量结构。这使设备能够在高达2500 °F （1371 °C）的温度下运行,同时保持出色的功率温度比。AW 810V还采用节能设计,最大限度地提高设备效率。通过使用高容量加热元件，设备确保最大功率，同时仍为用户提供快速恢复时间。ACCUTHERM AW 810V中的气流是完全可调节的，允许用户调节空气速度，为应用创造最佳的热环境。AW 810V的内室由高级铝钢建造而成。这样可以确保温度的均匀性和均匀性，同时保持加工材料的完整性。烤箱配有可调节的货架系统，允许用户定制烤箱的内部配置。ACCUTHERM AW 810V设计有坚固的门组件和独特的密封单元,可减少能源浪费并确保烤箱的完整性。AW 810V具有一系列用户友好的控制系统,例如数字显示、计时器和温度扫描。温控机提供精确的温度控制，完全可编程，允许用户精确重现温度曲线。用户还可以利用计时器控制方便的调度活动和温度扫描快速，同时加热不同的部件。除了ACCUTHERM AW 810V的多项功能外，还包括多项安全功能。AW 810V获得了UL-CE和CE的批准,包括保护人员、设备和正在处理的材料的一系列安全措施。这些安全功能包括过温控制继电器、高温报警工具和紧急关闭。ACCUTHERM AW 810V是各种需要高性能、可靠的烤箱或炉的工业应用的完美解决方桉。AW 810V具有高效的加热能力和先进的安全特性,是需要高效、可靠、经济高效的烤箱或炉的用户的绝佳选择。
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