二手 ACCUTHERM AW 820 #9185471 待售
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ID: 9185471
晶圆大小: 2"-8"
Rapid thermal processing system, 2"-8"
Ramp up rate: 10°C to 120°C per/sec
Maximum rate: 200°C
Steady state duration: 0-600 sec/step
Steady state temperature range: 150°C - 1150°C
ERP Pyrometer: 450°C-1250°C
With ±1°C accuracy
Thermocouple: 100°C-800°C
With ±0.5°C accuracy
Temperature:
Repeatability: ±0.5°C
Uniformity: ±8°C across an 8"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Main frame with wires
Pentium® class computer with touch screen monitor, 15"
Mouse and standard keyboard
Aluminum oven chamber
With water cooling passages
Gold plating plates
Door plate with TC connection port
Isolated quartz tube without pyrometer window or with Pyrometer window
Oven control board
Main control board
Bottom and top heating with 27 (1.2kW) radiation heating lamp module
(4) Bank zones
Top: Front and rear
Bottom: Front and rear
Quartz tray: 5" to 8" Round wafer / Customized
Gas lines with gas MFC with shut-off valve
T-Shape quartz with qualified K-type TC
Holder for 100°C-800°C temperature measurement
Thermocouple wires: (5)pcs
Options:
MFCs with gas control
Carrier / Susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Patented ERP pyrometer (400-1250°C)
Non-contact high temperature sensor
Chiller for ERP pyrometer
Single point for pyrometer calibration
Omega meter for pyrometer and thermocouple calibration
Shutt-off valve for quartz tube
Lamps cooling control
Spare parts
Type:
Atmospheric RTP RTA
Stand alone
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(27) Lamps
(4) Lamp zones
Isolated quartz tube
Gold plating plates:
Top
Bottom
Front
Rear
Left
Right
Water cooled oven chamber
Substrate size, 8"
Substrate thickness: <10 mm
Substrate material:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800°C-1250°C/1500°C
Temperature sensor: TC
Longest steady time @1000 °C: 30 mins
Vacuum pressure control: No
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating / Customized
Options:
Temperature sensor: ERP
Omega meter: CL23A
Susceptor: Base and cover
Power :
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 100
CE Marked.
ACCUTHERM AW 820是一种高效的电炉，通常用于陶瓷应用，如玻璃制造、搪瓷和金属加工。该炉具有先进的绝缘和自动温度控制功能，可保持温度恒定，是为最大限度节省能源而专门设计的。这款电炉由不锈钢框架构成，并配有碳化硅涂层钢内部和不锈钢外部。此外，该炉还在钢内部和不锈钢外部之间安装了一个特殊的耐热砖衬里，这有助于保持热量和电量。该炉还配备了强制空气冷却设备，以确保保持在最佳温度条件下。AW 820极好地利用技术来保证其能效。其最先进的电控系统管理其所有的热功能和能耗管理。这个电动控制单元包括一个触摸屏液晶面板，可以用来监控温度和能源使用情况，以及设定所需的工作温度。此外,还有一个内置节能计时器,可用于设置每个工作周期所需的开始和结束时间。ACCUTHERM AW 820的设计达到820°C的温度，温度均匀度± 3°C。其设计工作温度为0°C至1100°C，具有18.4 kW的额定功率和230V的单相功率输入。AW 820设计方便安全操作。它的整体安全特性包括一个热电偶效应激活的安全装置，以及一个弹簧加载的安全互锁，旨在防止未经授权进入炉子。此外，它的网门还配有一个限位开关，它将在打开炉子时切断炉子的电源。炉子还配有一个警报机，可以提醒用户注意任何不安全的操作条件。ACCUTHERM AW 820是设计精良、节能的电炉,具有最高的能效、良好的温度均匀性和良好的安全特性,是需要陶瓷工艺操作的绝佳选择。
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