二手 ACCUTHERMO AW 410 #9185454 待售

Rapid thermal processing system, 2"-4" Main frame with wires Pentium® class computer with LCD monitor, 17" Mouse and standard keyboard Aluminum oven chamber Water cooling passages Gold plating plates Door plate with one TC connection port Oven control board Main control board Bottom and top heating with 17 (1.5 kW) radiation heating lamp module Isolated quartz tube: Without pyrometer window With pyrometer window (4) Bank zones: Top: Front and rear Bottom: Front and rear Quartz tray: 2"- 4" Round wafer Gas line with gas MFC without shut-off valve T-Shaped quartz with qualified K type TC Holder: 100°C - 800°C Temperature measurement Thermocouple wires: (5) Pcs Specifications: Ramp up rate: 10°C to 120°C/sec Maximum rate: 200°C Steady state duration: 0-300 sec/step ERP Pyrometer: 450-1250°C With ±1°C accuracy Thermocouple: 100-800±0.5°C With ±0.5°C accuracy Temperature: Repeatability: ±0.5°C Uniformity: ±5°C across, 4" Gases used: N2 O2 Ar He Forming gas NH3 N2O2 Options: Patented ERP pyrometer: 400-1250°C MFCs With extended gas box Gas control board Carrier / Suspector for small sample Transparent substrate Substrate with metal thin film on top Non-Contact high temperature sensor Chiller: ERP Pyrometer Pyrometer calibration: Single point Omega meter CL23A Thermocouple calibration Shut-off valve: Quartz tube Lamps cooling control Spare parts Type: Atmospheric RTP RTA Desktop Manual loading PC Controller with real time control technology Lamp heating: Top and bottom (17) Lamps (4) Lamp zones Isolated quartz tube Gold plating plates: Top Bottom Front Rear Left Right Water cooled oven chamber Substrate size, 4" Substrate thickness: <7 mm Substrate material: Transparent Semitransparent Nontransparent Substrate shape: Round / Square / Abnormity Highest temperature: 800-1250°C Temperature sensor: TC Longest steady time @1000 °C: 5 Mins Vacuum pressure control: No Chamber cooling: Maximum: 35°C Dew point: 3°C 35 to 50 psi (2.5 to 3.5 kg/cm2) Pre-filtered water Susceptor material: Graphite with SiC coating / Customized Options: Temperature sensor: ERP Susceptor: Base and cover Gas line: 1 Dimension: 17”x18”x11” (DXWXH) Gas line: 2 tot 4 Dimension: 17”x26”x11” (DXWXH) Gas line: 5 to 6 Dimension: 17”x30”x11” (DXWXH) Power : 3 Phase 50/60 Hz AC 200V, 208V, 220V, 380V, 415V Amps: 60 CE Marked.